Research output: Contribution to journal › Conference article › peer-review
In the work we investigate processing and optoelectronic properties of ITO films coated on glass and Si substrates using RF magnetron deposition. Temperature annealing modifies the properties of the ITO film that affects the final characteristics of devices where they are used. It was discovered that a great change of characteristics is observed by annealing under the temperature of 200C: the increase of the transmission up to 90% and decrease of film resistance from 160 to 40 Ohm•-1. The ρc is 4•10-3Ω•cm2 for Au and 2•10-3Ω•cm2 for Ag contacts.
| Original language | English |
|---|---|
| Article number | 041035 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1124 |
| Issue number | 4 |
| DOIs | |
| State | Published - 2018 |
| Event | 5th International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures, Saint Petersburg OPEN 2018 - St. Petersburg Academic University RAS , ul. Khlopina 8/3, 194021 St. Petersburg, Russia, St. Petersburg, Russian Federation Duration: 2 Apr 2018 → 5 Apr 2018 http://spbopen2018.spbau.com/ http://ru.spbopen.spbau.com/ |
ID: 98506971