Research output: Contribution to journal › Article › peer-review
| Original language | English |
|---|---|
| Article number | 125010 |
| Number of pages | 19 |
| Journal | Plasma Sources Science and Technology |
| Volume | 32 |
| Issue number | 12 |
| DOIs | |
| State | Published - 20 Dec 2023 |
ID: 115092088