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Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. / Petrov, Yuri V.; Vyvenko, Oleg F.

Helium Ion Microscopy. ed. / Gregor Hlawacek; Armin Gölzhäuser. Springer Nature, 2016. p. 119-146 ( NanoScience and Technology).

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Research › peer-review

Harvard

Petrov, YV & Vyvenko, OF 2016, Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. in G Hlawacek & A Gölzhäuser (eds), Helium Ion Microscopy. NanoScience and Technology, Springer Nature, pp. 119-146. https://doi.org/10.1007/978-3-319-41990-9_5

APA

Petrov, Y. V., & Vyvenko, O. F. (2016). Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. In G. Hlawacek, & A. Gölzhäuser (Eds.), Helium Ion Microscopy (pp. 119-146). ( NanoScience and Technology). Springer Nature. https://doi.org/10.1007/978-3-319-41990-9_5

Vancouver

Petrov YV, Vyvenko OF. Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. In Hlawacek G, Gölzhäuser A, editors, Helium Ion Microscopy. Springer Nature. 2016. p. 119-146. ( NanoScience and Technology). https://doi.org/10.1007/978-3-319-41990-9_5

Author

Petrov, Yuri V. ; Vyvenko, Oleg F. / Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. Helium Ion Microscopy. editor / Gregor Hlawacek ; Armin Gölzhäuser. Springer Nature, 2016. pp. 119-146 ( NanoScience and Technology).

BibTeX

@inbook{dc3a166398be49efbdc4a58b101269ae,
title = "Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging",
abstract = "The theories, modeling and experiments of the processes of secondary electron (SE) generation and SE usage in helium ion microscopy (HIM) are reviewed and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.",
author = "Petrov, {Yuri V.} and Vyvenko, {Oleg F.}",
note = "Cite this chapter as: Petrov Y.V., Vyvenko O.F. (2016) Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. In: Hlawacek G., G{\"o}lzh{\"a}user A. (eds) Helium Ion Microscopy. NanoScience and Technology. Springer, Cham",
year = "2016",
doi = "10.1007/978-3-319-41990-9_5",
language = "English",
isbn = "978-3-319-41988-6",
series = " NanoScience and Technology",
publisher = "Springer Nature",
pages = "119--146",
editor = "Hlawacek, {Gregor } and G{\"o}lzh{\"a}user, {Armin }",
booktitle = "Helium Ion Microscopy",
address = "Germany",

}

RIS

TY - CHAP

T1 - Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging

AU - Petrov, Yuri V.

AU - Vyvenko, Oleg F.

N1 - Cite this chapter as: Petrov Y.V., Vyvenko O.F. (2016) Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging. In: Hlawacek G., Gölzhäuser A. (eds) Helium Ion Microscopy. NanoScience and Technology. Springer, Cham

PY - 2016

Y1 - 2016

N2 - The theories, modeling and experiments of the processes of secondary electron (SE) generation and SE usage in helium ion microscopy (HIM) are reviewed and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.

AB - The theories, modeling and experiments of the processes of secondary electron (SE) generation and SE usage in helium ion microscopy (HIM) are reviewed and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.

U2 - 10.1007/978-3-319-41990-9_5

DO - 10.1007/978-3-319-41990-9_5

M3 - Chapter

SN - 978-3-319-41988-6

T3 - NanoScience and Technology

SP - 119

EP - 146

BT - Helium Ion Microscopy

A2 - Hlawacek, Gregor

A2 - Gölzhäuser, Armin

PB - Springer Nature

ER -

ID: 7599765