Scanning Helium Ion Microscope: Distribution of Secondary Electrons and Ion Channeling

Research output: Contribution to journal › Article

Original language	English
Number of pages	4
Journal	Journal of Surface Investigation X-Ray, Synchrotron and Neutron Techniques
Volume	4
Issue number	5
DOIs	https://doi.org/10.1134/S1027451010050186
State	Published - 2010

ID: 8142861