Standard

Role of the inert component Ga2O3 in the composition with the activator oxide Sb2O3 in chemostimulated GaAs oxidation. / Mittova, I. Ya; Lopatin, S. I.; Pshestanchik, V. R.; Kostryukov, V. F.; Sergeeva, A. V.; Penskoi, P. K.

In: Russian Journal of Inorganic Chemistry, Vol. 50, No. 10, 10.2005, p. 1488-1491.

Research output: Contribution to journal › Article › peer-review

Harvard

Mittova, IY, Lopatin, SI, Pshestanchik, VR, Kostryukov, VF, Sergeeva, AV & Penskoi, PK 2005, 'Role of the inert component Ga2O3 in the composition with the activator oxide Sb2O3 in chemostimulated GaAs oxidation', Russian Journal of Inorganic Chemistry, vol. 50, no. 10, pp. 1488-1491.

APA

Mittova, I. Y., Lopatin, S. I., Pshestanchik, V. R., Kostryukov, V. F., Sergeeva, A. V., & Penskoi, P. K. (2005). Role of the inert component Ga2O3 in the composition with the activator oxide Sb2O3 in chemostimulated GaAs oxidation. Russian Journal of Inorganic Chemistry, 50(10), 1488-1491.

Vancouver

Mittova IY, Lopatin SI, Pshestanchik VR, Kostryukov VF, Sergeeva AV, Penskoi PK. Role of the inert component Ga2O3 in the composition with the activator oxide Sb2O3 in chemostimulated GaAs oxidation. Russian Journal of Inorganic Chemistry. 2005 Oct;50(10):1488-1491.

Author

Mittova, I. Ya ; Lopatin, S. I. ; Pshestanchik, V. R. ; Kostryukov, V. F. ; Sergeeva, A. V. ; Penskoi, P. K. / Role of the inert component Ga2O3 in the composition with the activator oxide Sb2O3 in chemostimulated GaAs oxidation. In: Russian Journal of Inorganic Chemistry. 2005 ; Vol. 50, No. 10. pp. 1488-1491.

BibTeX

@article{7ef16b00b3ea4e4b8a10ebb09d905170,
title = "Role of the inert component Ga2O3 in the composition with the activator oxide Sb2O3 in chemostimulated GaAs oxidation",
abstract = "The kinetic study of GaAs thermal oxidation in the presence of Sb 2O3 + Ga2O3 compositions showed a significant negative departure of the oxide film thickness from the additive line for low Ga2O3 concentrations. When the Ga 2O3 concentration in the compositions was higher than 40 mol %, the oxide film thickness grown on GaAs was an additive function of the activator composition. The nonlinear effects observed were caused by the influence of small Ga2O3 additions on the vaporization dynamics of antimony oxide through the enhancement of Sb2O 3 sintering during the experiment.",
author = "Mittova, {I. Ya} and Lopatin, {S. I.} and Pshestanchik, {V. R.} and Kostryukov, {V. F.} and Sergeeva, {A. V.} and Penskoi, {P. K.}",
year = "2005",
month = oct,
language = "English",
volume = "50",
pages = "1488--1491",
journal = "Russian Journal of Inorganic Chemistry",
issn = "0036-0236",
publisher = "МАИК {"}Наука/Интерпериодика{"}",
number = "10",

}

RIS

TY - JOUR

T1 - Role of the inert component Ga2O3 in the composition with the activator oxide Sb2O3 in chemostimulated GaAs oxidation

AU - Mittova, I. Ya

AU - Lopatin, S. I.

AU - Pshestanchik, V. R.

AU - Kostryukov, V. F.

AU - Sergeeva, A. V.

AU - Penskoi, P. K.

PY - 2005/10

Y1 - 2005/10

N2 - The kinetic study of GaAs thermal oxidation in the presence of Sb 2O3 + Ga2O3 compositions showed a significant negative departure of the oxide film thickness from the additive line for low Ga2O3 concentrations. When the Ga 2O3 concentration in the compositions was higher than 40 mol %, the oxide film thickness grown on GaAs was an additive function of the activator composition. The nonlinear effects observed were caused by the influence of small Ga2O3 additions on the vaporization dynamics of antimony oxide through the enhancement of Sb2O 3 sintering during the experiment.

AB - The kinetic study of GaAs thermal oxidation in the presence of Sb 2O3 + Ga2O3 compositions showed a significant negative departure of the oxide film thickness from the additive line for low Ga2O3 concentrations. When the Ga 2O3 concentration in the compositions was higher than 40 mol %, the oxide film thickness grown on GaAs was an additive function of the activator composition. The nonlinear effects observed were caused by the influence of small Ga2O3 additions on the vaporization dynamics of antimony oxide through the enhancement of Sb2O 3 sintering during the experiment.

UR - http://www.scopus.com/inward/record.url?scp=29144446285&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:29144446285

VL - 50

SP - 1488

EP - 1491

JO - Russian Journal of Inorganic Chemistry

JF - Russian Journal of Inorganic Chemistry

SN - 0036-0236

IS - 10

ER -

ID: 53800675