Research output: Chapter in Book/Report/Conference proceeding › Other chapter contribution › peer-review
Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer. / Filatova, E. ; Konashuk, A. ; Sakhonenkov , S. .
8th International Conference on Hard X-Ray Photoelectron Spectroscopy (HAXPES 2019): Book of Abstracts. 2019. p. OC-06.Research output: Chapter in Book/Report/Conference proceeding › Other chapter contribution › peer-review
}
TY - CHAP
T1 - Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer
AU - Filatova, E.
AU - Konashuk, A.
AU - Sakhonenkov , S.
PY - 2019
Y1 - 2019
M3 - Other chapter contribution
SP - OC-06
BT - 8th International Conference on Hard X-Ray Photoelectron Spectroscopy (HAXPES 2019)
T2 - 8th International Conference on Hard X-ray Photoelectron Spectroscopy
Y2 - 2 June 2019 through 7 June 2019
ER -
ID: 62445729