Parametric investigation on laser micro-patterned CuAlNi Shape-memory alloy (SMA) bimorph micromirror and its actuation performance

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Parametric investigation on laser micro-patterned CuAlNi Shape-memory alloy (SMA) bimorph micromirror and its actuation performance. / Jayachandran, S.; Karna, Pravin; Gangwar, Kaushal; Kaithwas, Ankit; Resnina, N.; Belyaev, S.; Palani, I. A.

In: Transactions of the Indian Institute of Metals, Vol. 74, No. 10, 10.2021, p. 2471-2480.

Research output: Contribution to journal › Article › peer-review

Author

Jayachandran, S. ; Karna, Pravin ; Gangwar, Kaushal ; Kaithwas, Ankit ; Resnina, N. ; Belyaev, S. ; Palani, I. A. / Parametric investigation on laser micro-patterned CuAlNi Shape-memory alloy (SMA) bimorph micromirror and its actuation performance. In: Transactions of the Indian Institute of Metals. 2021 ; Vol. 74, No. 10. pp. 2471-2480.

BibTeX

@article{fb1bdae7b95d4c70800f6685bb67c753,

title = "Parametric investigation on laser micro-patterned CuAlNi Shape-memory alloy (SMA) bimorph micromirror and its actuation performance",

abstract = "In this work, Shape-memory alloy (SMA)-based micromirrors were fabricated and the actuation was controlled through thermal stimulus. The micromirrors play a significant role in scanning and light deflection in the MEMS field. The SMA micromirrors were developed by coating CuAlNi thin film on strained kapton polyimide substrate using thermal evaporation. Later patterns were made on micromirrors for transmission and reflection of the light beam during actuation. The displacement of each distinct pattern was explored at different voltages ranging from 1 to 3 V through Joule heating technique. The maximum displacement observed was 1.9 mm for deltoid-patterned micromirror at 3 V. The ladder pattern recorded the minimum deflection of 1.1 mm at 3 V. The shape recovery ratio analysis showed that deltoid pattern bimorph had the highest recovery of 1.656. Energy-Dispersive X-ray Spectroscopy (EDS) analysis showed that the composition was maintained after the deposition.",

keywords = "CuAlNi, Joule heating, Micromirror, Shape-memory alloy, THIN-FILMS",

author = "S. Jayachandran and Pravin Karna and Kaushal Gangwar and Ankit Kaithwas and N. Resnina and S. Belyaev and Palani, {I. A.}",

note = "Publisher Copyright: {\textcopyright} 2021, The Indian Institute of Metals - IIM.",

year = "2021",

month = oct,

doi = "10.1007/s12666-021-02403-6",

language = "English",

volume = "74",

pages = "2471--2480",

journal = "Transactions of the Indian Institute of Metals",

issn = "0972-2815",

publisher = "Springer Nature",

number = "10",

}

RIS

TY - JOUR

T1 - Parametric investigation on laser micro-patterned CuAlNi Shape-memory alloy (SMA) bimorph micromirror and its actuation performance

AU - Jayachandran, S.

AU - Karna, Pravin

AU - Gangwar, Kaushal

AU - Kaithwas, Ankit

AU - Resnina, N.

AU - Belyaev, S.

AU - Palani, I. A.

PY - 2021/10

Y1 - 2021/10

N2 - In this work, Shape-memory alloy (SMA)-based micromirrors were fabricated and the actuation was controlled through thermal stimulus. The micromirrors play a significant role in scanning and light deflection in the MEMS field. The SMA micromirrors were developed by coating CuAlNi thin film on strained kapton polyimide substrate using thermal evaporation. Later patterns were made on micromirrors for transmission and reflection of the light beam during actuation. The displacement of each distinct pattern was explored at different voltages ranging from 1 to 3 V through Joule heating technique. The maximum displacement observed was 1.9 mm for deltoid-patterned micromirror at 3 V. The ladder pattern recorded the minimum deflection of 1.1 mm at 3 V. The shape recovery ratio analysis showed that deltoid pattern bimorph had the highest recovery of 1.656. Energy-Dispersive X-ray Spectroscopy (EDS) analysis showed that the composition was maintained after the deposition.

AB - In this work, Shape-memory alloy (SMA)-based micromirrors were fabricated and the actuation was controlled through thermal stimulus. The micromirrors play a significant role in scanning and light deflection in the MEMS field. The SMA micromirrors were developed by coating CuAlNi thin film on strained kapton polyimide substrate using thermal evaporation. Later patterns were made on micromirrors for transmission and reflection of the light beam during actuation. The displacement of each distinct pattern was explored at different voltages ranging from 1 to 3 V through Joule heating technique. The maximum displacement observed was 1.9 mm for deltoid-patterned micromirror at 3 V. The ladder pattern recorded the minimum deflection of 1.1 mm at 3 V. The shape recovery ratio analysis showed that deltoid pattern bimorph had the highest recovery of 1.656. Energy-Dispersive X-ray Spectroscopy (EDS) analysis showed that the composition was maintained after the deposition.

KW - CuAlNi

KW - Joule heating

KW - Micromirror

KW - Shape-memory alloy

KW - THIN-FILMS

UR - http://www.scopus.com/inward/record.url?scp=85114635011&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/cc3e35ee-7e62-3aab-b023-2a6dd8a9b4e7/

U2 - 10.1007/s12666-021-02403-6

DO - 10.1007/s12666-021-02403-6

M3 - Article

AN - SCOPUS:85114635011

VL - 74

SP - 2471

EP - 2480

JO - Transactions of the Indian Institute of Metals

JF - Transactions of the Indian Institute of Metals

SN - 0972-2815

IS - 10

ER -

ID: 86201127