Research output: Contribution to journal › Article › peer-review
On the reaction kinetics of chemically active molecular microwave plasmas. / Stancu, G. D.; Pipa, A. V.; Lombardi, G.; Davies, P. B.; Gicquel, A.; Lavrov, B. P.; Röpcke, J.
In: Contributions to Plasma Physics, Vol. 45, No. 5-6, 23.09.2005, p. 358-368.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - On the reaction kinetics of chemically active molecular microwave plasmas
AU - Stancu, G. D.
AU - Pipa, A. V.
AU - Lombardi, G.
AU - Davies, P. B.
AU - Gicquel, A.
AU - Lavrov, B. P.
AU - Röpcke, J.
PY - 2005/9/23
Y1 - 2005/9/23
N2 - Recent studies of phenomena in molecular non-equilibrium microwave plasmas, which have been performed within the framework of the DFG- Sonderforschungsbereich 198, project A12, are presented in this review article. Special attention is devoted to the properties and kinetics of transient molecular species. The experimental methods used were optical emission and absorption spectroscopy. The main objectives of this contribution were threefold: (i) the determination of the degree of dissociation of hydrogen in plasmas, (ii) the quantitative detection of the methyl radical, and (iii) plasma process monitoring using quantum cascade lasers.
AB - Recent studies of phenomena in molecular non-equilibrium microwave plasmas, which have been performed within the framework of the DFG- Sonderforschungsbereich 198, project A12, are presented in this review article. Special attention is devoted to the properties and kinetics of transient molecular species. The experimental methods used were optical emission and absorption spectroscopy. The main objectives of this contribution were threefold: (i) the determination of the degree of dissociation of hydrogen in plasmas, (ii) the quantitative detection of the methyl radical, and (iii) plasma process monitoring using quantum cascade lasers.
KW - Boron monoxide
KW - Degree of dissociation
KW - Hydrogen
KW - Methyl radical
KW - Microwave plasmas
KW - Quantum cascade laser
KW - Reaction kinetics
UR - http://www.scopus.com/inward/record.url?scp=24944545703&partnerID=8YFLogxK
U2 - 10.1002/ctpp.200510041
DO - 10.1002/ctpp.200510041
M3 - Article
AN - SCOPUS:24944545703
VL - 45
SP - 358
EP - 368
JO - Contributions to Plasma Physics
JF - Contributions to Plasma Physics
SN - 0863-1042
IS - 5-6
ER -
ID: 36193580