Research output: Contribution to journal › Article › peer-review
It is shown that the impact of the electron distribution function (EDF) nonlocality on the spatial profiles of excitation rates is important up to high gas pressures pR<100 cmtorr. A paradoxical effect related to the nonlocal character of the EDF is revealed: the peaks of the profiles of the excitation rates shift from the discharge axis toward the periphery as the pressure increases. This effect cannot be understood from the hydrodynamic point-of-view but is instead related to the nonlocal character of the EDF.
Original language | English |
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Pages (from-to) | 834-843 |
Number of pages | 10 |
Journal | IEEE Transactions on Plasma Science |
Volume | 34 |
Issue number | 3 PART 2 |
DOIs | |
State | Published - 2006 |
ID: 5040847