Research output: Contribution to journal › Article › peer-review
Nanoscale Cu2O films : Radio-frequency magnetron sputtering and structural and optical studies. / Kudryashov, D. A.; Gudovskikh, A. S.; Babichev, A. V.; Filimonov, V.; Mozharov, A. M.; Agekyan, V. F.; Borisov, E. V.; Serov, A. Yu; Filosofov, N. G.
In: Semiconductors, Vol. 51, No. 1, 01.01.2017, p. 110-114.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Nanoscale Cu2O films
T2 - Radio-frequency magnetron sputtering and structural and optical studies
AU - Kudryashov, D. A.
AU - Gudovskikh, A. S.
AU - Babichev, A. V.
AU - Filimonov, V.
AU - Mozharov, A. M.
AU - Agekyan, V. F.
AU - Borisov, E. V.
AU - Serov, A. Yu
AU - Filosofov, N. G.
N1 - Publisher Copyright: © 2017, Pleiades Publishing, Ltd. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2017/1/1
Y1 - 2017/1/1
N2 - Nanoscale copper (I) oxide layers are formed by magnetron-assisted sputtering onto glassy and silicon substrates in an oxygen-free environment at room temperature, and the structural and optical properties of the layers are studied. It is shown that copper oxide formed on a silicon substrate exhibits a lower degree of disorder than that formed on a glassy substrate, which is supported by the observation of a higher intensity and a smaller half-width of reflections in the diffraction pattern. The highest intensity of reflections in the diffraction pattern is observed for Cu2O films grown on silicon at a magnetron power of 150 W. The absorption and transmittance spectra of these Cu2O films are in agreement with the well-known spectra of bulk crystals. In the Raman spectra of the films, phonons inherent in the crystal lattice of cubic Cu2O crystals are identified.
AB - Nanoscale copper (I) oxide layers are formed by magnetron-assisted sputtering onto glassy and silicon substrates in an oxygen-free environment at room temperature, and the structural and optical properties of the layers are studied. It is shown that copper oxide formed on a silicon substrate exhibits a lower degree of disorder than that formed on a glassy substrate, which is supported by the observation of a higher intensity and a smaller half-width of reflections in the diffraction pattern. The highest intensity of reflections in the diffraction pattern is observed for Cu2O films grown on silicon at a magnetron power of 150 W. The absorption and transmittance spectra of these Cu2O films are in agreement with the well-known spectra of bulk crystals. In the Raman spectra of the films, phonons inherent in the crystal lattice of cubic Cu2O crystals are identified.
UR - http://www.scopus.com/inward/record.url?scp=85011982259&partnerID=8YFLogxK
U2 - 10.1134/S1063782617010110
DO - 10.1134/S1063782617010110
M3 - Article
AN - SCOPUS:85011982259
VL - 51
SP - 110
EP - 114
JO - Semiconductors
JF - Semiconductors
SN - 1063-7826
IS - 1
ER -
ID: 9324751