Nanofabrication by means of selective chemical etching enhanced by irradiation with a focused helium ion beam

Original language	English
State	Published - Sep 2020
Event	CMD 2020 GEFES - Duration: 31 Aug 2020 → 4 Sep 2020 https://www.cmd2020gefes.eu/28512/detail/2020-joint-conference-of-the-condensed-matter-divisions-of-eps-cmd-and-rsef-gefes.html

Conference	CMD 2020 GEFES
Period	31/08/20 → 4/09/20
Internet address	https://www.cmd2020gefes.eu/28512/detail/2020-joint-conference-of-the-condensed-matter-divisions-of-eps-cmd-and-rsef-gefes.html

ID: 71919491