MEASUREMENT OF THE STEP HEIGHT IN THE NANOMETRIC RANGE USING A LASER MICROINTERFEROMETER › SPbU Researchers Portal

MEASUREMENT OF THE STEP HEIGHT IN THE NANOMETRIC RANGE USING A LASER MICROINTERFEROMETER

Research output: Contribution to journal › Article

A.N. Korolev
V.I. Korotkov
A.Ya. Lukin
S.A. Pul'kin
A.L. Sizov

Original language	English
Pages (from-to)	352-358
Journal	Measurement Techniques
Volume	48
Issue number	4
State	Published - 2005
Externally published	Yes

ID: 5551908