Magnification of interferogram with the use of digital holography

Links

http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84906979457

DOI

https://doi.org/10.1109/LO.2014.6886309
Final published version
https://doi.org/10.1109/LO.2014.6886309
Other version

The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases.

Original language	English
Title of host publication	Proceedings - 2014 International Conference Laser Optics, LO 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)	9781479938858
DOIs	https://doi.org/10.1109/LO.2014.6886309 https://doi.org/10.1109/LO.2014.6886309
State	Published - 2014
Event	2014 International Conference Laser Optics, LO 2014 - St. Petersburg, Russian Federation Duration: 30 Jun 2014 → 4 Jul 2014

Publication series

Name	Proceedings - 2014 International Conference Laser Optics, LO 2014

Conference

Conference	2014 International Conference Laser Optics, LO 2014
Country/Territory	Russian Federation
City	St. Petersburg
Period	30/06/14 → 4/07/14

Scopus subject areas

Electronic, Optical and Magnetic Materials

Research areas

dynamic holography, holographic intereferometry, liquid crystal, spatial light modulator

ID: 4743153