Luminescence of Oxide Films Obtained by Atomic Layer Deposition › SPbU Researchers Portal

Luminescence of Oxide Films Obtained by Atomic Layer Deposition

Research output: Contribution to journal › Article › peer-review

Department of Solid State Electronics

DOI

https://doi.org/10.1134/s1063774523601211
Final published version

Original language	English
Pages (from-to)	85-92
Number of pages	8
Journal	Crystallography Reports
Volume	69
Issue number	1
DOIs	https://doi.org/10.1134/s1063774523601211
State	Published - 16 Apr 2024

Scopus subject areas

Physics and Astronomy(all)

ID: 118853980