Ionization kinetics and E-H mode transition in a noble gas, low-pressure pulsed ICP discharge

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Ionization kinetics and E-H mode transition in a noble gas, low-pressure pulsed ICP discharge. / Demidov, V. I.; Dejoseph, C. A.; Kudryavtsev, A. A.

In: Plasma Sources Science and Technology, Vol. 13, No. 4, 01.11.2004, p. 600-603.

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Author

Demidov, V. I. ; Dejoseph, C. A. ; Kudryavtsev, A. A. / Ionization kinetics and E-H mode transition in a noble gas, low-pressure pulsed ICP discharge. In: Plasma Sources Science and Technology. 2004 ; Vol. 13, No. 4. pp. 600-603.

BibTeX

@article{33a9646bf0774c7ca5970ba318155436,

title = "Ionization kinetics and E-H mode transition in a noble gas, low-pressure pulsed ICP discharge",

abstract = "Under some conditions of power modulation, an rf ICP will exhibit a rapid transition between E and H modes following application of the rf power. It is shown that in noble gases this transition may be connected with the dynamics of the electron density and metastable density of the atoms, and competition between direct and stepwise ionization of the atoms by electron impact. A simple model allows us to demonstrate that after application of rf power the initial slow growth of electron density changes to a rapidly rising function. This rapid rise is consistent with observed E-H transitions that take place in these discharges. The model thus allows us to calculate the characteristic time for the transition beteween modes.",

author = "Demidov, {V. I.} and Dejoseph, {C. A.} and Kudryavtsev, {A. A.}",

year = "2004",

month = nov,

day = "1",

doi = "10.1088/0963-0252/13/4/008",

language = "English",

volume = "13",

pages = "600--603",

journal = "Plasma Sources Science and Technology",

issn = "0963-0252",

publisher = "IOP Publishing Ltd.",

number = "4",

}

RIS

TY - JOUR

T1 - Ionization kinetics and E-H mode transition in a noble gas, low-pressure pulsed ICP discharge

AU - Demidov, V. I.

AU - Dejoseph, C. A.

AU - Kudryavtsev, A. A.

PY - 2004/11/1

Y1 - 2004/11/1

N2 - Under some conditions of power modulation, an rf ICP will exhibit a rapid transition between E and H modes following application of the rf power. It is shown that in noble gases this transition may be connected with the dynamics of the electron density and metastable density of the atoms, and competition between direct and stepwise ionization of the atoms by electron impact. A simple model allows us to demonstrate that after application of rf power the initial slow growth of electron density changes to a rapidly rising function. This rapid rise is consistent with observed E-H transitions that take place in these discharges. The model thus allows us to calculate the characteristic time for the transition beteween modes.

AB - Under some conditions of power modulation, an rf ICP will exhibit a rapid transition between E and H modes following application of the rf power. It is shown that in noble gases this transition may be connected with the dynamics of the electron density and metastable density of the atoms, and competition between direct and stepwise ionization of the atoms by electron impact. A simple model allows us to demonstrate that after application of rf power the initial slow growth of electron density changes to a rapidly rising function. This rapid rise is consistent with observed E-H transitions that take place in these discharges. The model thus allows us to calculate the characteristic time for the transition beteween modes.

UR - http://www.scopus.com/inward/record.url?scp=9944233588&partnerID=8YFLogxK

U2 - 10.1088/0963-0252/13/4/008

DO - 10.1088/0963-0252/13/4/008

M3 - Article

AN - SCOPUS:9944233588

VL - 13

SP - 600

EP - 603

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

SN - 0963-0252

IS - 4

ER -

ID: 52198797