Investigation of Low-Pressure Glow Discharge in a Coaxial Gridded Hollow Cathode

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Investigation of Low-Pressure Glow Discharge in a Coaxial Gridded Hollow Cathode. / Liang, Yonggan; Yuan, Chengxun; Gao, Ruilin; Jia, Jieshu; Kirsanov, Gennady V.; Bekasov, Vladimir S.; Marin, Alexander N.; Kudryavtsev, Anatoly A.; Eliseev, Stepan; Zhou, Zhongxiang.

In: IEEE Transactions on Plasma Science, Vol. 44, No. 12, 12.2016, p. 2965-2972.

Research output: Contribution to journal › Article › peer-review

Author

Liang, Yonggan ; Yuan, Chengxun ; Gao, Ruilin ; Jia, Jieshu ; Kirsanov, Gennady V. ; Bekasov, Vladimir S. ; Marin, Alexander N. ; Kudryavtsev, Anatoly A. ; Eliseev, Stepan ; Zhou, Zhongxiang. / Investigation of Low-Pressure Glow Discharge in a Coaxial Gridded Hollow Cathode. In: IEEE Transactions on Plasma Science. 2016 ; Vol. 44, No. 12. pp. 2965-2972.

BibTeX

@article{0a713ceca98d417ea7c8da98084003c7,

title = "Investigation of Low-Pressure Glow Discharge in a Coaxial Gridded Hollow Cathode",

abstract = "This paper contains results of numerical and experimental investigation of glow discharge plasma created in a chamber of a new-type large-volume coaxial gridded hollow cathode. The discharge is created in argon at 25 Pa by applying time-varying power with frequency 20 kHz on electrodes. A 2-D model of the discharge was built using COMSOL Multiphysics. Self-consistent description of the discharge was obtained using the extended fluid approach, which couples continuity equations for charged particles and electron energy balance with Poisson's equation for electric potential. Electron transport coefficients and rates of electron-impact reactions were calculated using the electron energy distribution function. The spatial and radial distributions of plasma potential (Vp), electron density (ne), and electron temperature (Te) were obtained. It is shown that the plasma inside the chamber is similar to the negative glow of a dc glow discharge. Comparison of numerical results with the Langmuir probe measurements of electron density and electron temperature is presented and showed a good agreement.",

keywords = "Glow discharge, plasma simulation, plasma sources",

author = "Yonggan Liang and Chengxun Yuan and Ruilin Gao and Jieshu Jia and Kirsanov, {Gennady V.} and Bekasov, {Vladimir S.} and Marin, {Alexander N.} and Kudryavtsev, {Anatoly A.} and Stepan Eliseev and Zhongxiang Zhou",

year = "2016",

month = dec,

doi = "10.1109/TPS.2016.2602443",

language = "English",

volume = "44",

pages = "2965--2972",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "12",

}

RIS

TY - JOUR

T1 - Investigation of Low-Pressure Glow Discharge in a Coaxial Gridded Hollow Cathode

AU - Liang, Yonggan

AU - Yuan, Chengxun

AU - Gao, Ruilin

AU - Jia, Jieshu

AU - Kirsanov, Gennady V.

AU - Bekasov, Vladimir S.

AU - Marin, Alexander N.

AU - Kudryavtsev, Anatoly A.

AU - Eliseev, Stepan

AU - Zhou, Zhongxiang

PY - 2016/12

Y1 - 2016/12

N2 - This paper contains results of numerical and experimental investigation of glow discharge plasma created in a chamber of a new-type large-volume coaxial gridded hollow cathode. The discharge is created in argon at 25 Pa by applying time-varying power with frequency 20 kHz on electrodes. A 2-D model of the discharge was built using COMSOL Multiphysics. Self-consistent description of the discharge was obtained using the extended fluid approach, which couples continuity equations for charged particles and electron energy balance with Poisson's equation for electric potential. Electron transport coefficients and rates of electron-impact reactions were calculated using the electron energy distribution function. The spatial and radial distributions of plasma potential (Vp), electron density (ne), and electron temperature (Te) were obtained. It is shown that the plasma inside the chamber is similar to the negative glow of a dc glow discharge. Comparison of numerical results with the Langmuir probe measurements of electron density and electron temperature is presented and showed a good agreement.

AB - This paper contains results of numerical and experimental investigation of glow discharge plasma created in a chamber of a new-type large-volume coaxial gridded hollow cathode. The discharge is created in argon at 25 Pa by applying time-varying power with frequency 20 kHz on electrodes. A 2-D model of the discharge was built using COMSOL Multiphysics. Self-consistent description of the discharge was obtained using the extended fluid approach, which couples continuity equations for charged particles and electron energy balance with Poisson's equation for electric potential. Electron transport coefficients and rates of electron-impact reactions were calculated using the electron energy distribution function. The spatial and radial distributions of plasma potential (Vp), electron density (ne), and electron temperature (Te) were obtained. It is shown that the plasma inside the chamber is similar to the negative glow of a dc glow discharge. Comparison of numerical results with the Langmuir probe measurements of electron density and electron temperature is presented and showed a good agreement.

KW - Glow discharge

KW - plasma simulation

KW - plasma sources

UR - http://www.scopus.com/inward/record.url?scp=85027035312&partnerID=8YFLogxK

U2 - 10.1109/TPS.2016.2602443

DO - 10.1109/TPS.2016.2602443

M3 - Article

VL - 44

SP - 2965

EP - 2972

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

IS - 12

ER -

ID: 7648742