Based on an in-depth survey of the literature, the purpose of the paper is to explore cyber-physical system-based manufacturing. Using and replicating data from Capgemini, CompTIA, EY, Microsoft, PAC, and PwC, we performed analyses and made estimates regarding the relationship between Internet of Things sensing networks, deep learning-enabled smart process planning, and big data-driven inno-vation. Data were analyzed using structural equation modeling.