Influence of heat and particle fluxes nonlocality on spatial distribution of plasma density in two-chamber ICP plasma sources

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Influence of heat and particle fluxes nonlocality on spatial distribution of plasma density in two-chamber ICP plasma sources. / Kudryavtsev, A.A.; Serditov, K.Yu.

In: Physics of Plasmas, Vol. 19, No. 7, 2012, p. 073504_1-6.

Research output: Contribution to journal › Article

BibTeX

@article{ee0ce414e3bd4c8689530d9f2497c666,

title = "Influence of heat and particle fluxes nonlocality on spatial distribution of plasma density in two-chamber ICP plasma sources",

abstract = "This study presents 2D simulations of the two-chamber inductively coupled plasma source where power is supplied in the small discharge chamber and extends by electron thermal conductivity mechanism to the big diffusion chamber. Depending on pressure, two main scenarios of plasma density and its spatial distribution behavior were identified. One case is characterized by the localization of plasma in the small driver chamber where power is deposed. Another case describes when the diffusion chamber becomes the main source of plasma with maximum of the electron density. The differences in spatial distribution are caused by local or non-local behavior of electron energy transport in the discharge volume due to different characteristic scale of heat transfer with electronic conductivity.",

keywords = "heat transfer, plasma density, plasma heating, plasma simulation, plasma sources, plasma transport processes, thermal conductivity",

author = "A.A. Kudryavtsev and K.Yu. Serditov",

year = "2012",

doi = "10.1063/1.4731734",

language = "English",

volume = "19",

pages = "073504_1--6",

journal = "Physics of Plasmas",

issn = "1070-664X",

publisher = "American Institute of Physics",

number = "7",

}

RIS

TY - JOUR

T1 - Influence of heat and particle fluxes nonlocality on spatial distribution of plasma density in two-chamber ICP plasma sources

AU - Kudryavtsev, A.A.

AU - Serditov, K.Yu.

PY - 2012

Y1 - 2012

N2 - This study presents 2D simulations of the two-chamber inductively coupled plasma source where power is supplied in the small discharge chamber and extends by electron thermal conductivity mechanism to the big diffusion chamber. Depending on pressure, two main scenarios of plasma density and its spatial distribution behavior were identified. One case is characterized by the localization of plasma in the small driver chamber where power is deposed. Another case describes when the diffusion chamber becomes the main source of plasma with maximum of the electron density. The differences in spatial distribution are caused by local or non-local behavior of electron energy transport in the discharge volume due to different characteristic scale of heat transfer with electronic conductivity.

AB - This study presents 2D simulations of the two-chamber inductively coupled plasma source where power is supplied in the small discharge chamber and extends by electron thermal conductivity mechanism to the big diffusion chamber. Depending on pressure, two main scenarios of plasma density and its spatial distribution behavior were identified. One case is characterized by the localization of plasma in the small driver chamber where power is deposed. Another case describes when the diffusion chamber becomes the main source of plasma with maximum of the electron density. The differences in spatial distribution are caused by local or non-local behavior of electron energy transport in the discharge volume due to different characteristic scale of heat transfer with electronic conductivity.

KW - heat transfer

KW - plasma density

KW - plasma heating

KW - plasma simulation

KW - plasma sources

KW - plasma transport processes

KW - thermal conductivity

U2 - 10.1063/1.4731734

DO - 10.1063/1.4731734

M3 - Article

VL - 19

SP - 073504_1-6

JO - Physics of Plasmas

JF - Physics of Plasmas

SN - 1070-664X

IS - 7

ER -

ID: 5292473