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Increasing the Interferogram Sensitivity by Digital Holography. / Balbekin, N. S.; Venediktov, V. Yu; Venediktov, D. V.; Petrov, N. V.; Konovalov, R. S.; Pul’kin, S. A.; Sevryugin, A. A.; Tursunov, I.; Shoev, V. I.

In: Optoelectronics, Instrumentation and Data Processing, Vol. 56, No. 2, 03.2020, p. 190-197.

Research output: Contribution to journal › Article › peer-review

Harvard

Balbekin, NS, Venediktov, VY, Venediktov, DV, Petrov, NV, Konovalov, RS, Pul’kin, SA, Sevryugin, AA, Tursunov, I & Shoev, VI 2020, 'Increasing the Interferogram Sensitivity by Digital Holography', Optoelectronics, Instrumentation and Data Processing, vol. 56, no. 2, pp. 190-197. https://doi.org/10.3103/S8756699020020028

APA

Balbekin, N. S., Venediktov, V. Y., Venediktov, D. V., Petrov, N. V., Konovalov, R. S., Pul’kin, S. A., Sevryugin, A. A., Tursunov, I., & Shoev, V. I. (2020). Increasing the Interferogram Sensitivity by Digital Holography. Optoelectronics, Instrumentation and Data Processing, 56(2), 190-197. https://doi.org/10.3103/S8756699020020028

Vancouver

Balbekin NS, Venediktov VY, Venediktov DV, Petrov NV, Konovalov RS, Pul’kin SA et al. Increasing the Interferogram Sensitivity by Digital Holography. Optoelectronics, Instrumentation and Data Processing. 2020 Mar;56(2):190-197. https://doi.org/10.3103/S8756699020020028

Author

Balbekin, N. S. ; Venediktov, V. Yu ; Venediktov, D. V. ; Petrov, N. V. ; Konovalov, R. S. ; Pul’kin, S. A. ; Sevryugin, A. A. ; Tursunov, I. ; Shoev, V. I. / Increasing the Interferogram Sensitivity by Digital Holography. In: Optoelectronics, Instrumentation and Data Processing. 2020 ; Vol. 56, No. 2. pp. 190-197.

BibTeX

@article{96ab618834594999b03d4bb154b30d22,
title = "Increasing the Interferogram Sensitivity by Digital Holography",
abstract = "Abstract: This paper presents the results of experimental studies and digital methods for recording of holograms using spatial light modulators. The use of holographic interference methods for measuring nanoscale irregularities is described for the case of a nanostep (70 nm in height and 30 μm in width). Examples are given of the method of increased sensitivity for nanostep measurements and the method of hooks using a digital technique. Correction of internal system distortions in the interferometer has been shown to be a workable method. The holographic interference methods with digital processing of holograms allows the sensitivity of interferograms to be increased without loss of basic information about the object and without increasing the measurement accuracy.",
keywords = "amplification of interferograms, distortion correction, hologram, holographic interferometry, nanometrology, Rozhdestvenskii hooks, spatial light modulator, spatial light modulator, hologram, Rozhdestvenskii hooks, holographic interferometry, distortion correction, amplification of interferograms, nanometrology",
author = "Balbekin, {N. S.} and Venediktov, {V. Yu} and Venediktov, {D. V.} and Petrov, {N. V.} and Konovalov, {R. S.} and Pul{\textquoteright}kin, {S. A.} and Sevryugin, {A. A.} and I. Tursunov and Shoev, {V. I.}",
note = "Publisher Copyright: {\textcopyright} 2020, Allerton Press, Inc.",
year = "2020",
month = mar,
doi = "10.3103/S8756699020020028",
language = "English",
volume = "56",
pages = "190--197",
journal = "Optoelectronics, Instrumentation and Data Processing",
issn = "8756-6990",
publisher = "Allerton Press, Inc.",
number = "2",

}

RIS

TY - JOUR

T1 - Increasing the Interferogram Sensitivity by Digital Holography

AU - Balbekin, N. S.

AU - Venediktov, V. Yu

AU - Venediktov, D. V.

AU - Petrov, N. V.

AU - Konovalov, R. S.

AU - Pul’kin, S. A.

AU - Sevryugin, A. A.

AU - Tursunov, I.

AU - Shoev, V. I.

N1 - Publisher Copyright: © 2020, Allerton Press, Inc.

PY - 2020/3

Y1 - 2020/3

N2 - Abstract: This paper presents the results of experimental studies and digital methods for recording of holograms using spatial light modulators. The use of holographic interference methods for measuring nanoscale irregularities is described for the case of a nanostep (70 nm in height and 30 μm in width). Examples are given of the method of increased sensitivity for nanostep measurements and the method of hooks using a digital technique. Correction of internal system distortions in the interferometer has been shown to be a workable method. The holographic interference methods with digital processing of holograms allows the sensitivity of interferograms to be increased without loss of basic information about the object and without increasing the measurement accuracy.

AB - Abstract: This paper presents the results of experimental studies and digital methods for recording of holograms using spatial light modulators. The use of holographic interference methods for measuring nanoscale irregularities is described for the case of a nanostep (70 nm in height and 30 μm in width). Examples are given of the method of increased sensitivity for nanostep measurements and the method of hooks using a digital technique. Correction of internal system distortions in the interferometer has been shown to be a workable method. The holographic interference methods with digital processing of holograms allows the sensitivity of interferograms to be increased without loss of basic information about the object and without increasing the measurement accuracy.

KW - amplification of interferograms

KW - distortion correction

KW - hologram

KW - holographic interferometry

KW - nanometrology

KW - Rozhdestvenskii hooks

KW - spatial light modulator

KW - spatial light modulator, hologram, Rozhdestvenskii hooks, holographic interferometry, distortion correction, amplification of interferograms, nanometrology

UR - http://www.scopus.com/inward/record.url?scp=85097602009&partnerID=8YFLogxK

U2 - 10.3103/S8756699020020028

DO - 10.3103/S8756699020020028

M3 - Article

AN - SCOPUS:85097602009

VL - 56

SP - 190

EP - 197

JO - Optoelectronics, Instrumentation and Data Processing

JF - Optoelectronics, Instrumentation and Data Processing

SN - 8756-6990

IS - 2

ER -

ID: 88340729