High-resolution Fourier-transform IR spectroscopic determination of impurities in silicon tetrafluoride and silane prepared from It › SPbU Researchers Portal

High-resolution Fourier-transform IR spectroscopic determination of impurities in silicon tetrafluoride and silane prepared from It

Research output: Contribution to journal › Article

L. A. Chuprov
P. G. Sennikov
K. G. Tokhadze
S. K. Ignatov
O. Schrems

Original language	English
Pages (from-to)	924-931
Journal	Inorganic Materials
Volume	42
Issue number	8
State	Published - 2006
Externally published	Yes

ID: 5115296