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Formation of Diamond-Like Carbon Films by the Plasma-Chemical Decomposition of Hydrocarbons. / Поволоцкий, Алексей Валерьевич; Смирнов, Егор Вячеславович; Тверьянович, Юрий Станиславович.

In: Glass Physics and Chemistry, Vol. 50, No. 3, 2024, p. 222–226.

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@article{901662ff0daf47789f68d466c33c7cae,
title = "Formation of Diamond-Like Carbon Films by the Plasma-Chemical Decomposition of Hydrocarbons.",
author = "Поволоцкий, {Алексей Валерьевич} and Смирнов, {Егор Вячеславович} and Тверьянович, {Юрий Станиславович}",
year = "2024",
doi = "10.1134/S1087659624600728",
language = "English",
volume = "50",
pages = "222–226",
journal = "Glass Physics and Chemistry",
issn = "1087-6596",
publisher = "МАИК {"}Наука/Интерпериодика{"}",
number = "3",

}

RIS

TY - JOUR

T1 - Formation of Diamond-Like Carbon Films by the Plasma-Chemical Decomposition of Hydrocarbons.

AU - Поволоцкий, Алексей Валерьевич

AU - Смирнов, Егор Вячеславович

AU - Тверьянович, Юрий Станиславович

PY - 2024

Y1 - 2024

U2 - 10.1134/S1087659624600728

DO - 10.1134/S1087659624600728

M3 - Article

VL - 50

SP - 222

EP - 226

JO - Glass Physics and Chemistry

JF - Glass Physics and Chemistry

SN - 1087-6596

IS - 3

ER -

ID: 127219706