Abstract: The atomic composition, work function, and structural properties of thin (10–150 nm) MoO3 films obtained by magnetron sputtering were studied by X-ray and ultraviolet photoelectron spectroscopy, X‑ray powder diffraction analysis, and atomic force microscopy
Original languageEnglish
Pages (from-to)373-376
Number of pages4
JournalBulletin of the Russian Academy of Sciences: Physics
Volume89
Issue number3
DOIs
StatePublished - 1 Mar 2025

    Research areas

  • electronic states, magnetron sputtering, molybdenum oxide, valence energy band, work function

ID: 135152382