It has been shown that low size dispersion systems of carbon nanoclusters can be fabricated by ion irradiation of fullerite C₆₀ film through a special mask. As the mask, lavsan track membrane with more or less equal pinholes of diameter of about 60 nm was used. STM study showed that fabricated clusters have a form of the cone-like island with average diameter of about 60 nm and height of about 5 nm.