Energetic spectra of dislocation networks produced by hydrophilic bonding of silicon wafers

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	20-23
Journal	Physica Status Solidi (C) Current Topics in Solid State Physics
Volume	10
Issue number	1
DOIs	https://doi.org/10.1002/pssc.201200396
State	Published - 2013

ID: 7374513