Electronic states of oxygen-free dislocation networks produced by direct bonding of silicon wafers

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	283-288
Journal	Diffusion and Defect Data Pt.B: Solid State Phenomena
Volume	156-158
DOIs	https://doi.org/10.4028/www.scientific.net/SSP.156-158.283
State	Published - 2009

ID: 5476806