Effect of thermal annealing and Al2O3-interlayer on intermixing in the TiN/SiO2/Si structure

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	117-120
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	196
DOIs	https://doi.org/10.1016/j.elspec.2013.12.001 https://doi.org/10.1016/j.elspec.2013.12.001
State	Published - 17 Dec 2013

ID: 6992528