Effect of Nonlinearity on Mode Localization Phenomena in Dynamics of MEMS Resonant Sensor with Two Electrostatically Coupled Microbeams

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Effect of Nonlinearity on Mode Localization Phenomena in Dynamics of MEMS Resonant Sensor with Two Electrostatically Coupled Microbeams. / Morozov, N. I.; Indeitsev, D. A.; Igumnova, V. S.; Lukin, A. V.; Popov, I. A.; Shtukin, L. V.

In: Vestnik St. Petersburg University: Mathematics, Vol. 54, No. 2, 04.2021, p. 135-144.

Research output: Contribution to journal › Article › peer-review

BibTeX

@article{e2efe2d672994fe7b8deb3133c2b3f96,

title = "Effect of Nonlinearity on Mode Localization Phenomena in Dynamics of MEMS Resonant Sensor with Two Electrostatically Coupled Microbeams",

abstract = "Abstract: In the presented study a model of a microelectromechanical accelerometer with two moving beam elements located between two fixed electrodes is proposed. The action of the transfer forces of inertia in the longitudinal direction leads to a change in the spectral properties of the system, which is a useful output signal of the sensor. The dynamics of the system with a weak electrostatic coupling between the sensitive elements is characterized by the phenomenon of modal localization: a significant change in the amplitude ratios for the forms of in-phase and antiphase oscillations with small changes in the measured component of the acceleration vector of the moving object. Diagrams of equilibrium positions are plotted for a variable potential difference between a fixed electrode and a moving element and between two moving elements. The dependences of the frequencies and the ratio of eigenvector components on the magnitude of the inertial action are investigated. It is shown that the sensitivity of a sensor based on modal localization can be orders of magnitude higher than the sensitivity of known systems based on measuring the shift of natural frequencies. A nonlinear dynamic model of an accelerometer with external harmonic electrostatic excitation of oscillations is constructed. Resonance characteristics are obtained, and a comparison is made between the model describing the modal characteristics of the system and the model describing the real dynamic mode of operation with account of nonlinear factors.",

keywords = "modal localization, resonance curves, resonant accelerometer, weakly coupled system",

author = "Morozov, {N. I.} and Indeitsev, {D. A.} and Igumnova, {V. S.} and Lukin, {A. V.} and Popov, {I. A.} and Shtukin, {L. V.}",

note = "Publisher Copyright: {\textcopyright} 2021, Pleiades Publishing, Ltd.",

year = "2021",

month = apr,

doi = "10.1134/S1063454121020072",

language = "English",

volume = "54",

pages = "135--144",

journal = "Vestnik St. Petersburg University: Mathematics",

issn = "1063-4541",

publisher = "Pleiades Publishing",

number = "2",

}

RIS

TY - JOUR

T1 - Effect of Nonlinearity on Mode Localization Phenomena in Dynamics of MEMS Resonant Sensor with Two Electrostatically Coupled Microbeams

AU - Morozov, N. I.

AU - Indeitsev, D. A.

AU - Igumnova, V. S.

AU - Lukin, A. V.

AU - Popov, I. A.

AU - Shtukin, L. V.

PY - 2021/4

Y1 - 2021/4

N2 - Abstract: In the presented study a model of a microelectromechanical accelerometer with two moving beam elements located between two fixed electrodes is proposed. The action of the transfer forces of inertia in the longitudinal direction leads to a change in the spectral properties of the system, which is a useful output signal of the sensor. The dynamics of the system with a weak electrostatic coupling between the sensitive elements is characterized by the phenomenon of modal localization: a significant change in the amplitude ratios for the forms of in-phase and antiphase oscillations with small changes in the measured component of the acceleration vector of the moving object. Diagrams of equilibrium positions are plotted for a variable potential difference between a fixed electrode and a moving element and between two moving elements. The dependences of the frequencies and the ratio of eigenvector components on the magnitude of the inertial action are investigated. It is shown that the sensitivity of a sensor based on modal localization can be orders of magnitude higher than the sensitivity of known systems based on measuring the shift of natural frequencies. A nonlinear dynamic model of an accelerometer with external harmonic electrostatic excitation of oscillations is constructed. Resonance characteristics are obtained, and a comparison is made between the model describing the modal characteristics of the system and the model describing the real dynamic mode of operation with account of nonlinear factors.

AB - Abstract: In the presented study a model of a microelectromechanical accelerometer with two moving beam elements located between two fixed electrodes is proposed. The action of the transfer forces of inertia in the longitudinal direction leads to a change in the spectral properties of the system, which is a useful output signal of the sensor. The dynamics of the system with a weak electrostatic coupling between the sensitive elements is characterized by the phenomenon of modal localization: a significant change in the amplitude ratios for the forms of in-phase and antiphase oscillations with small changes in the measured component of the acceleration vector of the moving object. Diagrams of equilibrium positions are plotted for a variable potential difference between a fixed electrode and a moving element and between two moving elements. The dependences of the frequencies and the ratio of eigenvector components on the magnitude of the inertial action are investigated. It is shown that the sensitivity of a sensor based on modal localization can be orders of magnitude higher than the sensitivity of known systems based on measuring the shift of natural frequencies. A nonlinear dynamic model of an accelerometer with external harmonic electrostatic excitation of oscillations is constructed. Resonance characteristics are obtained, and a comparison is made between the model describing the modal characteristics of the system and the model describing the real dynamic mode of operation with account of nonlinear factors.

KW - modal localization

KW - resonance curves

KW - resonant accelerometer

KW - weakly coupled system

UR - http://www.scopus.com/inward/record.url?scp=85108079114&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/40fdcd9b-e6d9-3ee1-8684-2c762e1b0724/

U2 - 10.1134/S1063454121020072

DO - 10.1134/S1063454121020072

M3 - Article

AN - SCOPUS:85108079114

VL - 54

SP - 135

EP - 144

JO - Vestnik St. Petersburg University: Mathematics

JF - Vestnik St. Petersburg University: Mathematics

SN - 1063-4541

IS - 2

ER -

ID: 88337775