Dynamics and Elastic Stability of an Electrostatically Actuated Microbeam Under Ultrafast Laser Pulse

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Dynamics and Elastic Stability of an Electrostatically Actuated Microbeam Under Ultrafast Laser Pulse. / Indeitsev, D. A.; Privalova, O. V.; Shtukin, L. V.

Structural Integrity. Springer Nature, 2019. p. 370-376 (Structural Integrity; Vol. 8).

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Research › peer-review

Author

Indeitsev, D. A. ; Privalova, O. V. ; Shtukin, L. V. / Dynamics and Elastic Stability of an Electrostatically Actuated Microbeam Under Ultrafast Laser Pulse. Structural Integrity. Springer Nature, 2019. pp. 370-376 (Structural Integrity).

BibTeX

@inbook{c5e2315438b14309a7a34d370ffadd1c,

title = "Dynamics and Elastic Stability of an Electrostatically Actuated Microbeam Under Ultrafast Laser Pulse",

abstract = "Laser-induced vibrations and elastic stability of a clamped-clamped beam electrostatic transducer are considered under ultrafast laser pulse. It is assumed that laser pulse acts as volume heat generation with Gaussian time-profile localized in near-surface layer of the beam. Temperature load non-stationarity and non-homogeneity through length and thickness lead to appearance of thermal-induced mechanical moment and axial forced acting on the beam, which can result in buckling phenomena. Semi-analytical methods for solution of nonlinear boundary-value problems are used for static equilibrium determination of the beam in the electric field of one stationary electrode. Analytical solution of non-stationary temperature problem in the beam volume is obtained. Finally, areas in parameter space of system geometrical and mechanical properties along with laser pulse characteristics are determined which correspond to elastic stability of initial equilibrium form of the beam subjected to laser pulse.",

keywords = "Bernoulli-Euler beam, Elastic stability, Laser pulse, MEMS",

author = "Indeitsev, {D. A.} and Privalova, {O. V.} and Shtukin, {L. V.}",

note = "Funding Information: Acknowledgements. This work was supported by the Russian Foundation for Basic Research, project no. 17–01–0414. Publisher Copyright: {\textcopyright} Springer Nature Switzerland AG 2019. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",

year = "2019",

doi = "10.1007/978-3-030-21894-2_66",

language = "English",

series = "Structural Integrity",

publisher = "Springer Nature",

pages = "370--376",

booktitle = "Structural Integrity",

address = "Germany",

}

RIS

TY - CHAP

T1 - Dynamics and Elastic Stability of an Electrostatically Actuated Microbeam Under Ultrafast Laser Pulse

AU - Indeitsev, D. A.

AU - Privalova, O. V.

AU - Shtukin, L. V.

N1 - Funding Information: Acknowledgements. This work was supported by the Russian Foundation for Basic Research, project no. 17–01–0414. Publisher Copyright: © Springer Nature Switzerland AG 2019. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.

PY - 2019

Y1 - 2019

N2 - Laser-induced vibrations and elastic stability of a clamped-clamped beam electrostatic transducer are considered under ultrafast laser pulse. It is assumed that laser pulse acts as volume heat generation with Gaussian time-profile localized in near-surface layer of the beam. Temperature load non-stationarity and non-homogeneity through length and thickness lead to appearance of thermal-induced mechanical moment and axial forced acting on the beam, which can result in buckling phenomena. Semi-analytical methods for solution of nonlinear boundary-value problems are used for static equilibrium determination of the beam in the electric field of one stationary electrode. Analytical solution of non-stationary temperature problem in the beam volume is obtained. Finally, areas in parameter space of system geometrical and mechanical properties along with laser pulse characteristics are determined which correspond to elastic stability of initial equilibrium form of the beam subjected to laser pulse.

AB - Laser-induced vibrations and elastic stability of a clamped-clamped beam electrostatic transducer are considered under ultrafast laser pulse. It is assumed that laser pulse acts as volume heat generation with Gaussian time-profile localized in near-surface layer of the beam. Temperature load non-stationarity and non-homogeneity through length and thickness lead to appearance of thermal-induced mechanical moment and axial forced acting on the beam, which can result in buckling phenomena. Semi-analytical methods for solution of nonlinear boundary-value problems are used for static equilibrium determination of the beam in the electric field of one stationary electrode. Analytical solution of non-stationary temperature problem in the beam volume is obtained. Finally, areas in parameter space of system geometrical and mechanical properties along with laser pulse characteristics are determined which correspond to elastic stability of initial equilibrium form of the beam subjected to laser pulse.

KW - Bernoulli-Euler beam

KW - Elastic stability

KW - Laser pulse

KW - MEMS

UR - http://www.scopus.com/inward/record.url?scp=85085166359&partnerID=8YFLogxK

U2 - 10.1007/978-3-030-21894-2_66

DO - 10.1007/978-3-030-21894-2_66

M3 - Chapter

AN - SCOPUS:85085166359

T3 - Structural Integrity

SP - 370

EP - 376

BT - Structural Integrity

PB - Springer Nature

ER -

ID: 75068536