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Digital holographic Michelson interferometer for nanometrology. / Sevrygin, A. A.; Korotkov, V. I.; Pulkin, S. A.; Tursunov, I. M.; Venediktov, D. V.; Venediktov, V. Yu; Volkov, O. V.
Holography, Diffractive Optics, and Applications VI. ed. / Yunlong Sheng; Changhe Zhou; Chongxiu Yu. SPIE, 2014. 927118 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9271).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
Harvard
Sevrygin, AA, Korotkov, VI
, Pulkin, SA, Tursunov, IM
, Venediktov, DV, Venediktov, VY & Volkov, OV 2014,
Digital holographic Michelson interferometer for nanometrology. in Y Sheng, C Zhou & C Yu (eds),
Holography, Diffractive Optics, and Applications VI., 927118, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9271, SPIE, Holography, Diffractive Optics, and Applications VI, Beijing, China,
9/10/14.
https://doi.org/10.1117/12.2071084APA
Sevrygin, A. A., Korotkov, V. I.
, Pulkin, S. A., Tursunov, I. M.
, Venediktov, D. V., Venediktov, V. Y., & Volkov, O. V. (2014).
Digital holographic Michelson interferometer for nanometrology. In Y. Sheng, C. Zhou, & C. Yu (Eds.),
Holography, Diffractive Optics, and Applications VI [927118] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9271). SPIE.
https://doi.org/10.1117/12.2071084Vancouver
Sevrygin AA, Korotkov VI
, Pulkin SA, Tursunov IM
, Venediktov DV, Venediktov VY et al.
Digital holographic Michelson interferometer for nanometrology. In Sheng Y, Zhou C, Yu C, editors, Holography, Diffractive Optics, and Applications VI. SPIE. 2014. 927118. (Proceedings of SPIE - The International Society for Optical Engineering).
https://doi.org/10.1117/12.2071084Author
Sevrygin, A. A. ; Korotkov, V. I.
; Pulkin, S. A. ; Tursunov, I. M.
; Venediktov, D. V. ; Venediktov, V. Yu ; Volkov, O. V. /
Digital holographic Michelson interferometer for nanometrology. Holography, Diffractive Optics, and Applications VI. editor / Yunlong Sheng ; Changhe Zhou ; Chongxiu Yu. SPIE, 2014. (Proceedings of SPIE - The International Society for Optical Engineering).
BibTeX
@inproceedings{f9778749ccdf4976b46ad140d3fb56e1,
title = "Digital holographic Michelson interferometer for nanometrology",
abstract = "The paper considers the dynamic holographic interferometry schemes with amplification (multiplication) of holographic fringes and with correction for distortions, imposed by the interferometer scheme elements. The use of digital microscope and of the matrix light modulator with direct addressing provides the completely digital closed-loop performance of the overall system for real-time evaluation of nano-scale objects size. Considered schemes were verified in the laboratory experiment, using the Michelson micro-interferometer, equipped by the USB-microscope and digital holography stage, equipped by the Holoeye spatial light modulator.",
keywords = "dynamic holography, holographic intereferometry, liquid crystal, spatial light modulator",
author = "Sevrygin, {A. A.} and Korotkov, {V. I.} and Pulkin, {S. A.} and Tursunov, {I. M.} and Venediktov, {D. V.} and Venediktov, {V. Yu} and Volkov, {O. V.}",
note = "Publisher Copyright: {\textcopyright} 2014 SPIE.; Holography, Diffractive Optics, and Applications VI ; Conference date: 09-10-2014 Through 11-10-2014",
year = "2014",
doi = "10.1117/12.2071084",
language = "English",
isbn = "978-162841344-1",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Yunlong Sheng and Changhe Zhou and Chongxiu Yu",
booktitle = "Holography, Diffractive Optics, and Applications VI",
address = "United States",
}
RIS
TY - GEN
T1 - Digital holographic Michelson interferometer for nanometrology
AU - Sevrygin, A. A.
AU - Korotkov, V. I.
AU - Pulkin, S. A.
AU - Tursunov, I. M.
AU - Venediktov, D. V.
AU - Venediktov, V. Yu
AU - Volkov, O. V.
N1 - Publisher Copyright:
© 2014 SPIE.
PY - 2014
Y1 - 2014
N2 - The paper considers the dynamic holographic interferometry schemes with amplification (multiplication) of holographic fringes and with correction for distortions, imposed by the interferometer scheme elements. The use of digital microscope and of the matrix light modulator with direct addressing provides the completely digital closed-loop performance of the overall system for real-time evaluation of nano-scale objects size. Considered schemes were verified in the laboratory experiment, using the Michelson micro-interferometer, equipped by the USB-microscope and digital holography stage, equipped by the Holoeye spatial light modulator.
AB - The paper considers the dynamic holographic interferometry schemes with amplification (multiplication) of holographic fringes and with correction for distortions, imposed by the interferometer scheme elements. The use of digital microscope and of the matrix light modulator with direct addressing provides the completely digital closed-loop performance of the overall system for real-time evaluation of nano-scale objects size. Considered schemes were verified in the laboratory experiment, using the Michelson micro-interferometer, equipped by the USB-microscope and digital holography stage, equipped by the Holoeye spatial light modulator.
KW - dynamic holography
KW - holographic intereferometry
KW - liquid crystal
KW - spatial light modulator
UR - http://www.scopus.com/inward/record.url?scp=84937844663&partnerID=8YFLogxK
U2 - 10.1117/12.2071084
DO - 10.1117/12.2071084
M3 - Conference contribution
SN - 978-162841344-1
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Holography, Diffractive Optics, and Applications VI
A2 - Sheng, Yunlong
A2 - Zhou, Changhe
A2 - Yu, Chongxiu
PB - SPIE
T2 - Holography, Diffractive Optics, and Applications VI
Y2 - 9 October 2014 through 11 October 2014
ER -
