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Development of a Probe System for Measuring Plasma Parameters under Conditions of Plasma Polymerization and Synthesis of Nanostructures

Research output: Contribution to journal › Article › peer-review

Department of Optics

DOI

https://doi.org/10.1134/S0018143923070378
Final published version

Original language	English
Pages (from-to)	S172–S177
Journal	High Energy Chemistry
Volume	57
DOIs	https://doi.org/10.1134/S0018143923070378
State	Published - 8 Sep 2023

ID: 110826894