Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Geometries, vibrational frequencies and thermodynamic properties of trimeric rings [XMYH](3) and tetrameric clusters [XMYH](4), X=H,F,Cl,Br,l; M=Al,Ga,In; Y=N,P,As have been obtained at B3LY-P/LAN-L2DZP level of theory. Thermodynamic analysis of the oligomerization reactions shows that formation of cluster species in the gas phase is thermodynamically favorable in case of X=H. Furthermore, gas-phase generation of hexamer species [HMYH](6) should also be viable. Nitrogen-containing oligomers are highly stable in respect to dissociation, which makes them promising candidates for the stoichiometry controlled CVD of doped nitrides.
| Original language | English |
|---|---|
| Title of host publication | FUNDAMENTAL GAS-PHASE AND SURFACE CHEMISTRY OF VAPOR-PHASE DEPOSITION II AND PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANFACTURING IV |
| Editors | MT Swihart, MD Allendorf, M Meyyappan |
| Publisher | The Electrochemical Society |
| Pages | 25-32 |
| Number of pages | 8 |
| ISBN (Print) | 1-56677-319-9 |
| State | Published - 2001 |
| Event | 2nd International Symposium on Fundamental Gas-Phase and Surface Chem of Vapor-Phase Deposition/4th Symp on Process Control, Diagnost and Modeling in Semiconductor Mfg - WASHINGTON Duration: 26 Mar 2001 → … |
| Name | Electrochemical Society Series |
|---|---|
| Publisher | ELECTROCHEMICAL SOC INC |
| Volume | 2001 |
| ISSN (Print) | 0275-0171 |
| Conference | 2nd International Symposium on Fundamental Gas-Phase and Surface Chem of Vapor-Phase Deposition/4th Symp on Process Control, Diagnost and Modeling in Semiconductor Mfg |
|---|---|
| City | WASHINGTON |
| Period | 26/03/01 → … |
ID: 85941759