Creation of micro-and nanochannels on the surface of silicon chips by lithography methods and investigation of ion transport in channel

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Creation of micro-and nanochannels on the surface of silicon chips by lithography methods and investigation of ion transport in channel. / Afonicheva, Polina; Lebedev, Denis; Bukatin, Anton; Mukhin, Ivan; Evstrapov, Anatoly.

In: Journal of Physics: Conference Series, Vol. 2103, No. 1, 012112, 14.12.2021.

Research output: Contribution to journal › Conference article › peer-review

BibTeX

@article{971b198c0b7d4921a6b227bb5810fe03,

title = "Creation of micro-and nanochannels on the surface of silicon chips by lithography methods and investigation of ion transport in channel",

abstract = "We developed a technique for fabrication microfluidic silicon-glass chips with a system of nanochannels connecting two microchannel using traditional optical lithography and a focused ion beam. To investigate the transport phenomena in the nanochannels we experimentally studied their ion conductivity and using optical microscopy confirmed the existence of the diffusion flow through them. The developed method allows us to create systems of nanochannels with on-purpose geometry and controlled sizes. Devices with such nanochannels can be applied in the creation of biosensor devices and for genetic studies.",

author = "Polina Afonicheva and Denis Lebedev and Anton Bukatin and Ivan Mukhin and Anatoly Evstrapov",

year = "2021",

month = dec,

day = "14",

doi = "10.1088/1742-6596/2103/1/012112",

language = "English",

volume = "2103",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

publisher = "IOP Publishing Ltd.",

number = "1",

url = "http://physica.spb.ru/",

}

RIS

TY - JOUR

T1 - Creation of micro-and nanochannels on the surface of silicon chips by lithography methods and investigation of ion transport in channel

AU - Afonicheva, Polina

AU - Lebedev, Denis

AU - Bukatin, Anton

AU - Mukhin, Ivan

AU - Evstrapov, Anatoly

PY - 2021/12/14

Y1 - 2021/12/14

N2 - We developed a technique for fabrication microfluidic silicon-glass chips with a system of nanochannels connecting two microchannel using traditional optical lithography and a focused ion beam. To investigate the transport phenomena in the nanochannels we experimentally studied their ion conductivity and using optical microscopy confirmed the existence of the diffusion flow through them. The developed method allows us to create systems of nanochannels with on-purpose geometry and controlled sizes. Devices with such nanochannels can be applied in the creation of biosensor devices and for genetic studies.

AB - We developed a technique for fabrication microfluidic silicon-glass chips with a system of nanochannels connecting two microchannel using traditional optical lithography and a focused ion beam. To investigate the transport phenomena in the nanochannels we experimentally studied their ion conductivity and using optical microscopy confirmed the existence of the diffusion flow through them. The developed method allows us to create systems of nanochannels with on-purpose geometry and controlled sizes. Devices with such nanochannels can be applied in the creation of biosensor devices and for genetic studies.

UR - http://www.scopus.com/inward/record.url?scp=85123471176&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/2103/1/012112

DO - 10.1088/1742-6596/2103/1/012112

M3 - Conference article

AN - SCOPUS:85123471176

VL - 2103

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012112

T2 - International Conference PhysicA.SPb/2021

Y2 - 18 October 2021 through 22 October 2021

ER -

ID: 95340820