An investigation was made of the influence of the state of the Si-SiO//2 phase boundary, represented by the built-in charge and surface state densities, on the surface transport of holes in an inversion layer. It was found that the state of the phase boundary could have a considerable influence on the mobility of free holes (particularly at low temperatures) and on the nature of their scattering in a surface inversion layer.

Original languageEnglish
Pages (from-to)247-249
Number of pages3
JournalSoviet physics. Semiconductors
Volume18
Issue number3
StatePublished - 1 Jan 1984

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  • Engineering(all)

ID: 42242677