Research output: Contribution to journal › Article › peer-review
| Original language | English |
|---|---|
| Article number | 114010 |
| Journal | Plasma Sources Science and Technology |
| Volume | 31 |
| Issue number | 11 |
| Early online date | 11 Jul 2022 |
| DOIs | |
| State | Published - Nov 2022 |
ID: 97835678