An analytic theory proposed in Ref. 1 [V. S. Sukhomlinov and E. N. Fafurina, Zh. Tekh. Fiz 65(4), 9 (1995); Tech. Phys. 40, 295 (1995)] for the backscattering of light ions by a solid surface is developed for the cases of multicomponent materials and materials in which the concentrations of some of its components vary with depth.

Original languageEnglish
Pages (from-to)14-17
Number of pages4
JournalTechnical Physics
Volume42
Issue number1
StatePublished - Jan 1997

    Scopus subject areas

  • Physics and Astronomy (miscellaneous)

ID: 9654144