Atomic Layer Deposition of CuCl nanoparticles › SPbU Researchers Portal

DOI

https://doi.org/DOI: 10.1063/1.3525929
Other version

G. Natarajan
P.S. Maydannik
D.C. Cameron
I.Kh. Akopyan
B.V. Novikov

Original language	English
Pages (from-to)	241905_1-3
Journal	Applied Physics Letters
Volume	97
Issue number	24
DOIs	https://doi.org/DOI: 10.1063/1.3525929
State	Published - 2010

ID: 5305927