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Application of synchrotron-radiation-based x-ray microprobe techniques for the analysis of recombination activity of metals precipitated at Si/SiGe misfit dislocations. / Vyvenko, O. F.; Buonassisi, T.; Istratov, A. A.; Weber, E. R.; Kittler, M.; Seifert, W.

In: Journal of Physics Condensed Matter, Vol. 14, No. 48, 16.12.2002, p. 13079-13086.

Research output: Contribution to journal › Article › peer-review

Harvard

Vyvenko, OF, Buonassisi, T, Istratov, AA, Weber, ER, Kittler, M & Seifert, W 2002, 'Application of synchrotron-radiation-based x-ray microprobe techniques for the analysis of recombination activity of metals precipitated at Si/SiGe misfit dislocations', Journal of Physics Condensed Matter, vol. 14, no. 48, pp. 13079-13086. https://doi.org/10.1088/0953-8984/14/48/353

APA

Vyvenko, O. F., Buonassisi, T., Istratov, A. A., Weber, E. R., Kittler, M., & Seifert, W. (2002). Application of synchrotron-radiation-based x-ray microprobe techniques for the analysis of recombination activity of metals precipitated at Si/SiGe misfit dislocations. Journal of Physics Condensed Matter, 14(48), 13079-13086. https://doi.org/10.1088/0953-8984/14/48/353

Vancouver

Vyvenko OF, Buonassisi T, Istratov AA, Weber ER, Kittler M, Seifert W. Application of synchrotron-radiation-based x-ray microprobe techniques for the analysis of recombination activity of metals precipitated at Si/SiGe misfit dislocations. Journal of Physics Condensed Matter. 2002 Dec 16;14(48):13079-13086. https://doi.org/10.1088/0953-8984/14/48/353

Author

Vyvenko, O. F. ; Buonassisi, T. ; Istratov, A. A. ; Weber, E. R. ; Kittler, M. ; Seifert, W. / Application of synchrotron-radiation-based x-ray microprobe techniques for the analysis of recombination activity of metals precipitated at Si/SiGe misfit dislocations. In: Journal of Physics Condensed Matter. 2002 ; Vol. 14, No. 48. pp. 13079-13086.

BibTeX

@article{97d92462fbd7451484cf581b1b63a05d,
title = "Application of synchrotron-radiation-based x-ray microprobe techniques for the analysis of recombination activity of metals precipitated at Si/SiGe misfit dislocations",
abstract = "In this study we report application of synchrotron-radiation-based x-ray microprobe techniques (the x-ray-beam-induced current (XBIC) and x-ray fluorescence (μ-XRF) methods) to the analysis of the recombination activity and space distribution of copper and iron in the vicinity of dislocations in silicon/silicon-germanium structures. A combination of these two techniques enables one to study the chemical nature of the defects and impurities and their recombination activity in situ and to map metal clusters with a micron-scale resolution. XRF analysis revealed that copper formed clearly distinguishable precipitates along the misfit dislocations. A proportional dependence between the XBIC contrast and the number of copper atoms in the precipitates was established. In hydrogen-passivated iron-contaminated samples we observed clusters of iron precipitates which had no recombination activity detectable by the XBIC technique as well as iron clusters which were not completely passivated.",
author = "Vyvenko, {O. F.} and T. Buonassisi and Istratov, {A. A.} and Weber, {E. R.} and M. Kittler and W. Seifert",
year = "2002",
month = dec,
day = "16",
doi = "10.1088/0953-8984/14/48/353",
language = "English",
volume = "14",
pages = "13079--13086",
journal = "Journal of Physics Condensed Matter",
issn = "0953-8984",
publisher = "IOP Publishing Ltd.",
number = "48",

}

RIS

TY - JOUR

T1 - Application of synchrotron-radiation-based x-ray microprobe techniques for the analysis of recombination activity of metals precipitated at Si/SiGe misfit dislocations

AU - Vyvenko, O. F.

AU - Buonassisi, T.

AU - Istratov, A. A.

AU - Weber, E. R.

AU - Kittler, M.

AU - Seifert, W.

PY - 2002/12/16

Y1 - 2002/12/16

N2 - In this study we report application of synchrotron-radiation-based x-ray microprobe techniques (the x-ray-beam-induced current (XBIC) and x-ray fluorescence (μ-XRF) methods) to the analysis of the recombination activity and space distribution of copper and iron in the vicinity of dislocations in silicon/silicon-germanium structures. A combination of these two techniques enables one to study the chemical nature of the defects and impurities and their recombination activity in situ and to map metal clusters with a micron-scale resolution. XRF analysis revealed that copper formed clearly distinguishable precipitates along the misfit dislocations. A proportional dependence between the XBIC contrast and the number of copper atoms in the precipitates was established. In hydrogen-passivated iron-contaminated samples we observed clusters of iron precipitates which had no recombination activity detectable by the XBIC technique as well as iron clusters which were not completely passivated.

AB - In this study we report application of synchrotron-radiation-based x-ray microprobe techniques (the x-ray-beam-induced current (XBIC) and x-ray fluorescence (μ-XRF) methods) to the analysis of the recombination activity and space distribution of copper and iron in the vicinity of dislocations in silicon/silicon-germanium structures. A combination of these two techniques enables one to study the chemical nature of the defects and impurities and their recombination activity in situ and to map metal clusters with a micron-scale resolution. XRF analysis revealed that copper formed clearly distinguishable precipitates along the misfit dislocations. A proportional dependence between the XBIC contrast and the number of copper atoms in the precipitates was established. In hydrogen-passivated iron-contaminated samples we observed clusters of iron precipitates which had no recombination activity detectable by the XBIC technique as well as iron clusters which were not completely passivated.

UR - http://www.scopus.com/inward/record.url?scp=0037122117&partnerID=8YFLogxK

U2 - 10.1088/0953-8984/14/48/353

DO - 10.1088/0953-8984/14/48/353

M3 - Article

AN - SCOPUS:0037122117

VL - 14

SP - 13079

EP - 13086

JO - Journal of Physics Condensed Matter

JF - Journal of Physics Condensed Matter

SN - 0953-8984

IS - 48

ER -

ID: 87815073