TY - GEN

T1 - Application of metasurface to inclination angle measurement

AU - Efremova, Ekaterina A.

AU - Shalymov, Egor V.

AU - Venediktov, Vladimir Yu

AU - Venediktova, Anastasia V.

AU - Zinchik, Alexander A.

N1 - Publisher Copyright: © 2020 SPIE.

PY - 2020

Y1 - 2020

N2 - To date, many works devoted to the influence of grazing angle on the spectral properties of nanostructured metasurfaces have been published. In this case, the dependence of the spectrum on grazing angle was previously considered within the framework of solving filtering problems, for example: Constructing tunable optical filters based on metasurfaces; development of a bandpass filter with characteristics that are minimally dependent on the angle of incidence of light (angular tolerant color filter), etc. We propose to use the described property of nanostructured metasurfaces for solution of an inverse problem-determination of light incidence angle from the change in the metasurface spectral response. It will provide no-contact determination of an inclination angle of an object, on which the metasurface is installed; it is a step towards creating a miniature and accurate angle sensor. We consider the idea of using metasurfaces to measure inclination angles of objects on the basis of dielectric subwavelength gratings using computer simulation. We also analyze the possibility of simultaneous measurement of rotations (inclination angles) along two orthogonal axes using the same nanostructured metasurface.

AB - To date, many works devoted to the influence of grazing angle on the spectral properties of nanostructured metasurfaces have been published. In this case, the dependence of the spectrum on grazing angle was previously considered within the framework of solving filtering problems, for example: Constructing tunable optical filters based on metasurfaces; development of a bandpass filter with characteristics that are minimally dependent on the angle of incidence of light (angular tolerant color filter), etc. We propose to use the described property of nanostructured metasurfaces for solution of an inverse problem-determination of light incidence angle from the change in the metasurface spectral response. It will provide no-contact determination of an inclination angle of an object, on which the metasurface is installed; it is a step towards creating a miniature and accurate angle sensor. We consider the idea of using metasurfaces to measure inclination angles of objects on the basis of dielectric subwavelength gratings using computer simulation. We also analyze the possibility of simultaneous measurement of rotations (inclination angles) along two orthogonal axes using the same nanostructured metasurface.

KW - angle sensor

KW - Metasurfaces

KW - modelling

KW - nanophotonics

KW - nanostructured materials

KW - position control systems

UR - http://www.scopus.com/inward/record.url?scp=85096608131&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/edd8d0da-7d85-3777-9e0e-6ee3ae7b60ce/

U2 - 10.1117/12.2573682

DO - 10.1117/12.2573682

M3 - Conference contribution

AN - SCOPUS:85096608131

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Advanced Sensor Systems and Applications X

A2 - He, Zuyuan

A2 - Peng, Gang-Ding

PB - SPIE

T2 - Advanced Sensor Systems and Applications X 2020

Y2 - 11 October 2020 through 16 October 2020

ER -