Research output: Contribution to journal › Article › peer-review
All-Liquid Laser-Assisted Fabrication Of 3D-Textured Hybrid Metal–Semiconductor SERS Platforms. / Zakharov, A.; Vavilov, A.; Levshakova, A.; Pilnik, A.; Mitsai, E.; Shevlyagin, A.; Khairullina, E.; Kuchmizhak, A.; Manshina, A.
In: Optical Materials, Vol. 174, 117955, 01.06.2026.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - All-Liquid Laser-Assisted Fabrication Of 3D-Textured Hybrid Metal–Semiconductor SERS Platforms
AU - Zakharov, A.
AU - Vavilov, A.
AU - Levshakova, A.
AU - Pilnik, A.
AU - Mitsai, E.
AU - Shevlyagin, A.
AU - Khairullina, E.
AU - Kuchmizhak, A.
AU - Manshina, A.
PY - 2026/2/11
Y1 - 2026/2/11
N2 - We report an all-liquid, vacuum-free approach for fabricating hybrid metal–semiconductor platforms for surface-enhanced Raman scattering (SERS). Silicon wafers were textured into upright (Pyr-Si) and inverted pyramids (IPyr-Si) by anisotropic alkaline etching and Cu-assisted chemical etching, respectively, both yielding broadband antireflective morphologies. Subsequent laser-induced deposition (LID) enabled surfactant-free decoration of these 3D morphologies with Au, Ag, and bimetallic AuAg nanoparticles directly in solution. Scanning electron microscopy (SEM) images and energy dispersive X-ray spectroscopy (EDX) mapping versus exposure time reveal distinct Ag/Au growth modes consistent with plasmon-assisted and substrate-assisted pathways. SERS performance was benchmarked with rhodamine 6G (R6G) down to 10−12 M, delivering an enhancement factor of ∼2.9 × 109 for Ag/IPyr-Si. Practical sensing of ketoprofen and plasmon-driven catalytic dimerization of p-aminothiophenol (PATP) were also demonstrated. Compared with conventional vacuum-based techniques, this approach minimizes air exposure, lowers costs, and delivers conformal nanoparticle coverage on complex silicon morphologies, providing a scalable route to reproducible, high-performance SERS sensors and related optoelectronic interfaces.
AB - We report an all-liquid, vacuum-free approach for fabricating hybrid metal–semiconductor platforms for surface-enhanced Raman scattering (SERS). Silicon wafers were textured into upright (Pyr-Si) and inverted pyramids (IPyr-Si) by anisotropic alkaline etching and Cu-assisted chemical etching, respectively, both yielding broadband antireflective morphologies. Subsequent laser-induced deposition (LID) enabled surfactant-free decoration of these 3D morphologies with Au, Ag, and bimetallic AuAg nanoparticles directly in solution. Scanning electron microscopy (SEM) images and energy dispersive X-ray spectroscopy (EDX) mapping versus exposure time reveal distinct Ag/Au growth modes consistent with plasmon-assisted and substrate-assisted pathways. SERS performance was benchmarked with rhodamine 6G (R6G) down to 10−12 M, delivering an enhancement factor of ∼2.9 × 109 for Ag/IPyr-Si. Practical sensing of ketoprofen and plasmon-driven catalytic dimerization of p-aminothiophenol (PATP) were also demonstrated. Compared with conventional vacuum-based techniques, this approach minimizes air exposure, lowers costs, and delivers conformal nanoparticle coverage on complex silicon morphologies, providing a scalable route to reproducible, high-performance SERS sensors and related optoelectronic interfaces.
KW - Inverted pyramid silicon
KW - Ketoprofen
KW - Laser-induced deposition
KW - Plasmonic nanoparticle
KW - Pyramidal silicon
KW - Surface-enhanced Raman scattering
UR - https://www.mendeley.com/catalogue/850d1756-7795-32cd-a568-ba69a5c0c241/
U2 - 10.1016/j.optmat.2026.117955
DO - 10.1016/j.optmat.2026.117955
M3 - Article
VL - 174
JO - Optical Materials
JF - Optical Materials
SN - 0925-3467
M1 - 117955
ER -
ID: 148586514