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A Novel Model of a Mode-Localized MEMS Accelerometer. / Morozov, N. F.; Indeitsev, D. A.; Igumnova, V. S.; Belyaev, Ya V.; Lukin, A. V.; Popov, I. A.; Shtukin, L. V.

In: Doklady Physics, Vol. 65, No. 10, 10.2020, p. 371-375.

Research output: Contribution to journal › Article › peer-review

Harvard

Morozov, NF, Indeitsev, DA, Igumnova, VS, Belyaev, YV, Lukin, AV, Popov, IA & Shtukin, LV 2020, 'A Novel Model of a Mode-Localized MEMS Accelerometer', Doklady Physics, vol. 65, no. 10, pp. 371-375. https://doi.org/10.1134/S1028335820100031

APA

Morozov, N. F., Indeitsev, D. A., Igumnova, V. S., Belyaev, Y. V., Lukin, A. V., Popov, I. A., & Shtukin, L. V. (2020). A Novel Model of a Mode-Localized MEMS Accelerometer. Doklady Physics, 65(10), 371-375. https://doi.org/10.1134/S1028335820100031

Vancouver

Morozov NF, Indeitsev DA, Igumnova VS, Belyaev YV, Lukin AV, Popov IA et al. A Novel Model of a Mode-Localized MEMS Accelerometer. Doklady Physics. 2020 Oct;65(10):371-375. https://doi.org/10.1134/S1028335820100031

Author

Morozov, N. F. ; Indeitsev, D. A. ; Igumnova, V. S. ; Belyaev, Ya V. ; Lukin, A. V. ; Popov, I. A. ; Shtukin, L. V. / A Novel Model of a Mode-Localized MEMS Accelerometer. In: Doklady Physics. 2020 ; Vol. 65, No. 10. pp. 371-375.

BibTeX

@article{ad056ab8fed848c49b4d399d5f17e5c9,
title = "A Novel Model of a Mode-Localized MEMS Accelerometer",
abstract = "Abstract: In this work, a model of a microelectromechanical accelerometer with two movable beam elements located between two stationary electrodes is proposed. The action of inertia forces in the longitudinal direction leads to a change in the spectral properties of the system, which can be used as an output signal of the sensor. The dynamics of the system in the presence of weak electrostatic coupling between the sensitive elements is characterized by the phenomenon of modal localization, which is a significant change in the amplitude relationships for the forms of in-phase and antiphase oscillations with small changes in the measured component of the object{\textquoteright}s acceleration vector. It has been shown that the sensitivity of the proposed sensor based on modal localization can be orders of magnitude higher than the sensitivity of systems based on measuring the shift of natural frequencies.",
keywords = "accelerometer, MEMS, modal localization, weakly coupled systems",
author = "Morozov, {N. F.} and Indeitsev, {D. A.} and Igumnova, {V. S.} and Belyaev, {Ya V.} and Lukin, {A. V.} and Popov, {I. A.} and Shtukin, {L. V.}",
note = "Funding Information: This work was supported by the Russian Foundation for Basic Research, project no. 20-01-00537. Publisher Copyright: {\textcopyright} 2020. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",
year = "2020",
month = oct,
doi = "10.1134/S1028335820100031",
language = "English",
volume = "65",
pages = "371--375",
journal = "Doklady Physics",
issn = "1028-3358",
publisher = "МАИК {"}Наука/Интерпериодика{"}",
number = "10",

}

RIS

TY - JOUR

T1 - A Novel Model of a Mode-Localized MEMS Accelerometer

AU - Morozov, N. F.

AU - Indeitsev, D. A.

AU - Igumnova, V. S.

AU - Belyaev, Ya V.

AU - Lukin, A. V.

AU - Popov, I. A.

AU - Shtukin, L. V.

N1 - Funding Information: This work was supported by the Russian Foundation for Basic Research, project no. 20-01-00537. Publisher Copyright: © 2020. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.

PY - 2020/10

Y1 - 2020/10

N2 - Abstract: In this work, a model of a microelectromechanical accelerometer with two movable beam elements located between two stationary electrodes is proposed. The action of inertia forces in the longitudinal direction leads to a change in the spectral properties of the system, which can be used as an output signal of the sensor. The dynamics of the system in the presence of weak electrostatic coupling between the sensitive elements is characterized by the phenomenon of modal localization, which is a significant change in the amplitude relationships for the forms of in-phase and antiphase oscillations with small changes in the measured component of the object’s acceleration vector. It has been shown that the sensitivity of the proposed sensor based on modal localization can be orders of magnitude higher than the sensitivity of systems based on measuring the shift of natural frequencies.

AB - Abstract: In this work, a model of a microelectromechanical accelerometer with two movable beam elements located between two stationary electrodes is proposed. The action of inertia forces in the longitudinal direction leads to a change in the spectral properties of the system, which can be used as an output signal of the sensor. The dynamics of the system in the presence of weak electrostatic coupling between the sensitive elements is characterized by the phenomenon of modal localization, which is a significant change in the amplitude relationships for the forms of in-phase and antiphase oscillations with small changes in the measured component of the object’s acceleration vector. It has been shown that the sensitivity of the proposed sensor based on modal localization can be orders of magnitude higher than the sensitivity of systems based on measuring the shift of natural frequencies.

KW - accelerometer

KW - MEMS

KW - modal localization

KW - weakly coupled systems

UR - http://www.scopus.com/inward/record.url?scp=85096187250&partnerID=8YFLogxK

U2 - 10.1134/S1028335820100031

DO - 10.1134/S1028335820100031

M3 - Article

AN - SCOPUS:85096187250

VL - 65

SP - 371

EP - 375

JO - Doklady Physics

JF - Doklady Physics

SN - 1028-3358

IS - 10

ER -

ID: 75068113