Research output: Contribution to journal › Article › peer-review
On the base of the MKh-1320 mass spectrometer and the UELI-1 electron-beam evaporator, a laboratory installation is developed, which allows to determine vapour phase composition in materials sputtering by means of electron beam evaporation and equilibrium-mode evaporation from effusion chambers. The evaporation of certain titanium dioxide-based oxide systems is studied.
| Original language | English |
|---|---|
| Pages (from-to) | 219-223 |
| Number of pages | 5 |
| Journal | Pribory i Tekhnika Eksperimenta |
| Issue number | 3 |
| State | Published - May 1993 |
ID: 85628892