Research output: Contribution to journal › Article › peer-review
Молекулярно-пучковая эпитаксия метаморфного буфера для InGaAs/InP фотодетекторов с высокой фоточувствительностью в диапазоне 2.2–2.6 мкм. / Василькова, Елена Игоревна; Пирогов, Евгений Викторович; Соболев, Максим Сергеевич; Убыйвовк, Евгений Викторович; Мизиров, Андрей Михайлович; Середин, Павел Владимирович.
In: Конденсированные среды и межфазные границы, Vol. 25, No. 1, 2023, p. 20-26.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Молекулярно-пучковая эпитаксия метаморфного буфера для InGaAs/InP фотодетекторов с высокой фоточувствительностью в диапазоне 2.2–2.6 мкм
AU - Василькова, Елена Игоревна
AU - Пирогов, Евгений Викторович
AU - Соболев, Максим Сергеевич
AU - Убыйвовк, Евгений Викторович
AU - Мизиров, Андрей Михайлович
AU - Середин, Павел Владимирович
PY - 2023
Y1 - 2023
N2 - The present work is concerned with finding optimal technological conditions for the synthesis of heterostructures with a metamorphic buffer for InGaAs/InP photodetectors in the wavelength range of 2.2–2.6 um using molecular beam epitaxy. Three choices of buffer structure differing in design and growth parameters were proposed. The internal structure of the grown samples was investigated by X-ray diffraction and transmission electron microscopy. Experimental data analysis has shown that the greatest degree of elastic strain relaxation in the InGaAs active layer was achieved in the sample where the metamorphic buffer formation ended with a consecutive increase and decrease in temperature. The said buffer also had InAs/InAlAs superlattice inserts. The dislocation density in this sample turned out to be minimal out of three, which allowed us to conclude that the described heterostructure configuration appears to be the most appropriate for manufacturing of short wavelength infrared range pin-photodetectors with high photosensitivity.
AB - The present work is concerned with finding optimal technological conditions for the synthesis of heterostructures with a metamorphic buffer for InGaAs/InP photodetectors in the wavelength range of 2.2–2.6 um using molecular beam epitaxy. Three choices of buffer structure differing in design and growth parameters were proposed. The internal structure of the grown samples was investigated by X-ray diffraction and transmission electron microscopy. Experimental data analysis has shown that the greatest degree of elastic strain relaxation in the InGaAs active layer was achieved in the sample where the metamorphic buffer formation ended with a consecutive increase and decrease in temperature. The said buffer also had InAs/InAlAs superlattice inserts. The dislocation density in this sample turned out to be minimal out of three, which allowed us to conclude that the described heterostructure configuration appears to be the most appropriate for manufacturing of short wavelength infrared range pin-photodetectors with high photosensitivity.
KW - Metamorphic buffer
KW - Molecular beam epitaxy
KW - Short wavelength infrared range photodetectors
KW - Transmission electron microscopy
KW - X-ray diffraction analysis
UR - https://www.mendeley.com/catalogue/f534f169-4d51-3c66-913f-6e4ec40ec33a/
U2 - 10.17308/kcmf.2023.25/10972
DO - 10.17308/kcmf.2023.25/10972
M3 - статья
VL - 25
SP - 20
EP - 26
JO - Конденсированные среды и межфазные границы
JF - Конденсированные среды и межфазные границы
SN - 1606-867X
IS - 1
ER -
ID: 105650791