The products of superficial chemical reactions of functional groups (-OH, -OCH3) of silica with SnCU are investigated by means of the Mossbauer spectroscopy. It is shown that the reagents (SnCU и Н20) are necessary to use for the synthesis of SnO*2 nanocrystals SnCb on silica by the molecular layering technique (ML-ALD), and the other reagents (SnCU и СН3ОН ) are used for synthesis of Sn02 nanolayers.