TY - JOUR

T1 - Towards the creation of an inverse electron distribution function in two-chamber inductively coupled plasma discharges

AU - Wang, Ying

AU - Chen, Nie

AU - Yao, Jingfeng

AU - Богданов, Евгений Анатольевич

AU - Кудрявцев, Анатолий Анатольевич

AU - Yuan, Chengxun

AU - Zhou, Zhongxiang

PY - 2025/5/1

Y1 - 2025/5/1

N2 - This work continues the studies on searching for plasma media with the inverse electron energy distribution function (EEDF) and providing recommendations for setting up subsequent experiments. The inverse EEDF is a distribution function that increases with an increase in energy at zero electron energy. The inverse EEDF plays a central role in the problem of negative conductivity. Based on the previously obtained criterion for the formation of an inverse EEDF in a spatially inhomogeneous plasma, a heuristic method is proposed that allows one to avoid resource-intensive calculations for spatially two-dimensional (2D) kinetic modeling on a large array of different glow discharges. It is shown that the conditions for EEDF inversion can be realized in two-chamber discharge structures due to violating the known Boltzmann distribution for electron density. The theoretical conclusions are validated by numerical modeling of low-pressure two-chamber inductively-coupled plasma (ICP) discharges in the COMSOL Multiphysics environment. As a result, areas of conditions with inverse EEDF were found for subsequent detailed kinetic analysis and experimental studies.

AB - This work continues the studies on searching for plasma media with the inverse electron energy distribution function (EEDF) and providing recommendations for setting up subsequent experiments. The inverse EEDF is a distribution function that increases with an increase in energy at zero electron energy. The inverse EEDF plays a central role in the problem of negative conductivity. Based on the previously obtained criterion for the formation of an inverse EEDF in a spatially inhomogeneous plasma, a heuristic method is proposed that allows one to avoid resource-intensive calculations for spatially two-dimensional (2D) kinetic modeling on a large array of different glow discharges. It is shown that the conditions for EEDF inversion can be realized in two-chamber discharge structures due to violating the known Boltzmann distribution for electron density. The theoretical conclusions are validated by numerical modeling of low-pressure two-chamber inductively-coupled plasma (ICP) discharges in the COMSOL Multiphysics environment. As a result, areas of conditions with inverse EEDF were found for subsequent detailed kinetic analysis and experimental studies.

KW - Boltzmann kinetic equation

KW - electron kinetics

KW - gas discharge

KW - inductively coupled plasma

KW - inverse electron distribution function

KW - nonlocal electron distribution function

UR - https://www.mendeley.com/catalogue/6b5893f2-8a5c-3c3c-8e7c-66421b028c54/

U2 - 10.1088/2058-6272/adb895

DO - 10.1088/2058-6272/adb895

M3 - Article

VL - 27

JO - Plasma Science and Technology

JF - Plasma Science and Technology

SN - 1009-0630

IS - 5

M1 - 055401

ER -