Quantum-Chemical Study of Silicon Halide Adducts with Nitrogen-containing Donors: III. Energy Effects of Ammonolysis and Complex-Formation Reactions in Silicon Tetrahalide-Ammonia Systems

T. N. Sevast'yanova, A. Yu Timoshkin, E. I. Davydova, O. V. Dubov, A. V. Suvorov, Henry F. Schaefer

Результат исследований: Научные публикации в периодических изданияхстатья

4 Цитирования (Scopus)

Аннотация

Thermodynamic characteristics of hydrogen halide elimination from SiX 4-NH3 systems were calculated by the B3LYP density functional method. The role of adducts and oligomeric forms of compounds containing Si-N bonds, as intermediates in the chemical vapor deposition of silicon nitride, was considered. It was shown experimentally that the reaction between silicon tetrachloride and ammonia in non-aqueous solvents involves ammonolysis.

Язык оригиналаанглийский
Страницы (с-по)48-53
Число страниц6
ЖурналRussian Journal of General Chemistry
Том73
Номер выпуска1
DOI
СостояниеОпубликовано - 1 янв 2003

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