Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer

Результат исследований: Материалы конференцийтезисы

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Язык оригиналаанглийский
СтраницыOC-06
Число страниц1
СостояниеОпубликовано - 2019

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@conference{1a4893a84e2e4a5993ded3c291f1c0f8,
title = "Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer",
author = "Филатова, {Елена Олеговна} and Конашук, {Алексей Сергеевич} and Сахоненков, {Сергей Сергеевич}",
year = "2019",
language = "English",
pages = "OC--06",

}

TY - CONF

T1 - Probing the Composition and Extension of Interface by HAXPES. Inhibition of Oxygen Scavenging by TiN at the TiN/Dielectric Interface by Protective Layer

AU - Филатова, Елена Олеговна

AU - Конашук, Алексей Сергеевич

AU - Сахоненков, Сергей Сергеевич

PY - 2019

Y1 - 2019

M3 - Abstract

SP - OC-06

ER -