TY - JOUR

T1 - Modeling of Phase Shifts of Light in Orders of Diffraction Gratings of an Interference Linear Displacement Sensor

AU - Odinokov, S. B.

AU - Shishova, M. V.

AU - Zherdev, A. Yu

AU - Kovalev, M. S.

AU - Galkin, M. L.

AU - Venediktov, V. Yu

N1 - Publisher Copyright: © 2019, Pleiades Publishing, Ltd.

PY - 2019/9/1

Y1 - 2019/9/1

N2 - Abstract: Phase shifts of light in orders of diffraction grating for the interference linear displacement sensor are considered. Using the phase diffraction grating with given geometric parameters of the surface relief allows one to stabilize phase relations in optical signals and in resulting signals outputted from the displacement sensor. Based on the mathematical simulation data, technically feasible parameters of the grating relief are proposed for creating the required phase shifts between diffracted beams leading to quadrature modulation. It helps reaching the required measurement accuracy with nanometric resolution.

AB - Abstract: Phase shifts of light in orders of diffraction grating for the interference linear displacement sensor are considered. Using the phase diffraction grating with given geometric parameters of the surface relief allows one to stabilize phase relations in optical signals and in resulting signals outputted from the displacement sensor. Based on the mathematical simulation data, technically feasible parameters of the grating relief are proposed for creating the required phase shifts between diffracted beams leading to quadrature modulation. It helps reaching the required measurement accuracy with nanometric resolution.

KW - linear displacement sensor

KW - phase shift

KW - quadrature signals

UR - http://www.scopus.com/inward/record.url?scp=85073249748&partnerID=8YFLogxK

U2 - 10.1134/S0030400X19090212

DO - 10.1134/S0030400X19090212

M3 - Article

AN - SCOPUS:85073249748

VL - 127

SP - 527

EP - 534

JO - OPTICS AND SPECTROSCOPY

JF - OPTICS AND SPECTROSCOPY

SN - 0030-400X

IS - 3

ER -