Mathematical simulation of a membrane capacitive compensation pressure transducer

A. I. Eikhval’d, I. V. Sadkovskaya, T. A. Eikhval’d

Результат исследований: Научные публикации в периодических изданияхстатья

Выдержка

The operation of a membrane capacitive pressure transducer with electrostatic compensation of the membrane deformation has been mathematically simulated. It is shown that the theory describing these instruments is incorrect and the error in measuring pressure by them may be as high as 25–29% of the measured value, which makes them inappropriate for use in pressure metrology.

Язык оригиналаанглийский
Страницы (с-по)769-771
Число страниц3
ЖурналTechnical Physics Letters
Том42
Номер выпуска8
DOI
СостояниеОпубликовано - 1 авг 2016

Отпечаток

pressure sensors
membranes
metrology
simulation
electrostatics

Предметные области Scopus

  • Физика и астрономия (разное)

Цитировать

Eikhval’d, A. I. ; Sadkovskaya, I. V. ; Eikhval’d, T. A. / Mathematical simulation of a membrane capacitive compensation pressure transducer. В: Technical Physics Letters. 2016 ; Том 42, № 8. стр. 769-771.
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Mathematical simulation of a membrane capacitive compensation pressure transducer. / Eikhval’d, A. I.; Sadkovskaya, I. V.; Eikhval’d, T. A.

В: Technical Physics Letters, Том 42, № 8, 01.08.2016, стр. 769-771.

Результат исследований: Научные публикации в периодических изданияхстатья

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