Main scenarios of spatial distribution of charged and neutral components in SF6 plasma

Результат исследований: Научные публикации в периодических изданияхстатья

4 Цитирования (Scopus)

Выдержка

Numerical modeling and theoretical analyses of spatial distribution with detailed set of plasmachemical processes in elegas have been made for a wide range of pressures. Evolution of main charged and neutral particles in time and space has been obtained. It is shown that at low pressures, the Boltzmann distribution holds for both electrons and negative ions and separation of the plasma into two regions with an almost flat profile of the electron density. At high pressures, electronegativity of plasma is extremely high and the self-consistent electric field is determined not only by the electrons, as in the conventional plasma, but also by the ions of both signs. This leads to an abnormally small potential drop in the plasma and nonmonotonic ion profiles.
Язык оригиналаанглийский
Страницы (с-по)3254-3267
ЖурналIEEE Transactions on Plasma Science
Том41
Номер выпуска12
DOI
СостояниеОпубликовано - 2013

Отпечаток

spatial distribution
ions
Boltzmann distribution
neutral particles
profiles
negative ions
charged particles
electrons
low pressure
electric fields

Цитировать

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abstract = "Numerical modeling and theoretical analyses of spatial distribution with detailed set of plasmachemical processes in elegas have been made for a wide range of pressures. Evolution of main charged and neutral particles in time and space has been obtained. It is shown that at low pressures, the Boltzmann distribution holds for both electrons and negative ions and separation of the plasma into two regions with an almost flat profile of the electron density. At high pressures, electronegativity of plasma is extremely high and the self-consistent electric field is determined not only by the electrons, as in the conventional plasma, but also by the ions of both signs. This leads to an abnormally small potential drop in the plasma and nonmonotonic ion profiles.",
author = "E.A. Bogdanov and A.A. Kudryavtsev and Z.S. Ochikova",
year = "2013",
doi = "10.1109/TPS.2013.2278839",
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Main scenarios of spatial distribution of charged and neutral components in SF6 plasma. / Bogdanov, E.A.; Kudryavtsev, A.A.; Ochikova, Z.S.

В: IEEE Transactions on Plasma Science, Том 41, № 12, 2013, стр. 3254-3267.

Результат исследований: Научные публикации в периодических изданияхстатья

TY - JOUR

T1 - Main scenarios of spatial distribution of charged and neutral components in SF6 plasma

AU - Bogdanov, E.A.

AU - Kudryavtsev, A.A.

AU - Ochikova, Z.S.

PY - 2013

Y1 - 2013

N2 - Numerical modeling and theoretical analyses of spatial distribution with detailed set of plasmachemical processes in elegas have been made for a wide range of pressures. Evolution of main charged and neutral particles in time and space has been obtained. It is shown that at low pressures, the Boltzmann distribution holds for both electrons and negative ions and separation of the plasma into two regions with an almost flat profile of the electron density. At high pressures, electronegativity of plasma is extremely high and the self-consistent electric field is determined not only by the electrons, as in the conventional plasma, but also by the ions of both signs. This leads to an abnormally small potential drop in the plasma and nonmonotonic ion profiles.

AB - Numerical modeling and theoretical analyses of spatial distribution with detailed set of plasmachemical processes in elegas have been made for a wide range of pressures. Evolution of main charged and neutral particles in time and space has been obtained. It is shown that at low pressures, the Boltzmann distribution holds for both electrons and negative ions and separation of the plasma into two regions with an almost flat profile of the electron density. At high pressures, electronegativity of plasma is extremely high and the self-consistent electric field is determined not only by the electrons, as in the conventional plasma, but also by the ions of both signs. This leads to an abnormally small potential drop in the plasma and nonmonotonic ion profiles.

U2 - 10.1109/TPS.2013.2278839

DO - 10.1109/TPS.2013.2278839

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JF - IEEE Transactions on Plasma Science

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