Magnification of interferogram with the use of digital holography

V. Ivanov, S. Pul'Kin, A. Sevryugin, V. Venediktov

Результат исследований: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференции

Выдержка

The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases. © 2014 IEEE.
Язык оригиналаанглийский
Название основной публикацииProceedings - 2014 International Conference Laser Optics, LO 2014
DOI
СостояниеОпубликовано - 2014

Отпечаток

magnification
holography
interferometry
holographic interferometry
sensitivity
interference

Цитировать

Ivanov, V., Pul'Kin, S., Sevryugin, A., & Venediktov, V. (2014). Magnification of interferogram with the use of digital holography. В Proceedings - 2014 International Conference Laser Optics, LO 2014 https://doi.org/10.1109/LO.2014.6886309
Ivanov, V. ; Pul'Kin, S. ; Sevryugin, A. ; Venediktov, V. / Magnification of interferogram with the use of digital holography. Proceedings - 2014 International Conference Laser Optics, LO 2014. 2014.
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title = "Magnification of interferogram with the use of digital holography",
abstract = "The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases. {\circledC} 2014 IEEE.",
author = "V. Ivanov and S. Pul'Kin and A. Sevryugin and V. Venediktov",
year = "2014",
doi = "10.1109/LO.2014.6886309",
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Ivanov, V, Pul'Kin, S, Sevryugin, A & Venediktov, V 2014, Magnification of interferogram with the use of digital holography. в Proceedings - 2014 International Conference Laser Optics, LO 2014. https://doi.org/10.1109/LO.2014.6886309

Magnification of interferogram with the use of digital holography. / Ivanov, V.; Pul'Kin, S.; Sevryugin, A.; Venediktov, V.

Proceedings - 2014 International Conference Laser Optics, LO 2014. 2014.

Результат исследований: Публикации в книгах, отчётах, сборниках, трудах конференцийстатья в сборнике материалов конференции

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T1 - Magnification of interferogram with the use of digital holography

AU - Ivanov, V.

AU - Pul'Kin, S.

AU - Sevryugin, A.

AU - Venediktov, V.

PY - 2014

Y1 - 2014

N2 - The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases. © 2014 IEEE.

AB - The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases. © 2014 IEEE.

U2 - 10.1109/LO.2014.6886309

DO - 10.1109/LO.2014.6886309

M3 - Conference contribution

SN - 9781479938858

BT - Proceedings - 2014 International Conference Laser Optics, LO 2014

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Ivanov V, Pul'Kin S, Sevryugin A, Venediktov V. Magnification of interferogram with the use of digital holography. В Proceedings - 2014 International Conference Laser Optics, LO 2014. 2014 https://doi.org/10.1109/LO.2014.6886309