The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases. © 2014 IEEE.
|Название основной публикации||Proceedings - 2014 International Conference Laser Optics, LO 2014|
|Состояние||Опубликовано - 2014|